中国物理B ›› 2022, Vol. 31 ›› Issue (10): 108106-108106.doi: 10.1088/1674-1056/ac7e35

所属专题： SPECIAL TOPIC — Celebrating the 70th Anniversary of the Physics of Jilin University

• SPECIAL TOPIC—Celebrating the 70th Anniversary of the Physics of Jilin University • 上一篇    下一篇

Relationship between the spatial position of the seed and growth mode for single-crystal diamond grown with an enclosed-type holder

Wen-Liang Xie(谢文良)1,2, Xian-Yi Lv(吕宪义)1,2, Qi-Liang Wang(王启亮)1,2, Liu-An Li(李柳暗)1,2,†, and Guang-Tian Zou(邹广田)1,2,‡   

  1. 1. State Key Laboratory of Superhard Materials, Jilin University, Changchun 130012, China;
    2. Shenzhen Research Institute, Jilin University, Shenzhen 518057, China
  • 收稿日期:2022-04-03 修回日期:2022-06-17 出版日期:2022-10-16 发布日期:2022-09-16
  • 通讯作者: Liu-An Li, Guang-Tian Zou E-mail:liliuan@jlu.edu.cn;gtzou@jlu.edu.cn
  • 基金资助:
    Project supported by the Key-Area Research and Development Program of Guangdong Province, China (Grant No. 2020B0101690001).

Relationship between the spatial position of the seed and growth mode for single-crystal diamond grown with an enclosed-type holder

Wen-Liang Xie(谢文良)1,2, Xian-Yi Lv(吕宪义)1,2, Qi-Liang Wang(王启亮)1,2, Liu-An Li(李柳暗)1,2,†, and Guang-Tian Zou(邹广田)1,2,‡   

  1. 1. State Key Laboratory of Superhard Materials, Jilin University, Changchun 130012, China;
    2. Shenzhen Research Institute, Jilin University, Shenzhen 518057, China
  • Received:2022-04-03 Revised:2022-06-17 Online:2022-10-16 Published:2022-09-16
  • Contact: Liu-An Li, Guang-Tian Zou E-mail:liliuan@jlu.edu.cn;gtzou@jlu.edu.cn
  • Supported by:
    Project supported by the Key-Area Research and Development Program of Guangdong Province, China (Grant No. 2020B0101690001).

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摘要： The relationship between the spatial position of the diamond seed and growth mode is investigated with an enclosed-type holder for single-crystal diamond growth using the microwave plasma chemical vapor deposition epitaxial method. The results demonstrate that there are three main regions by varying the spatial position of the seed. Due to the plasma concentration occurring at the seed edge, a larger depth is beneficial to transfer the plasma to the holder surface and suppress the polycrystalline diamond rim around the seed edge. However, the plasma density at the edge decreases drastically when the depth is too large, resulting in the growth of a vicinal grain plane and the reduction of surface area. By adopting an appropriate spatial location, the size of single-crystal diamond can be increased from 7 mm × 7 mm × 0.35 mm to 8.6 mm × 8.6 mm × 2.8 mm without the polycrystalline diamond rim.

关键词: MPCVD, single-crystal diamond growth, enclosed-type holder, growth mode modulation

Abstract: The relationship between the spatial position of the diamond seed and growth mode is investigated with an enclosed-type holder for single-crystal diamond growth using the microwave plasma chemical vapor deposition epitaxial method. The results demonstrate that there are three main regions by varying the spatial position of the seed. Due to the plasma concentration occurring at the seed edge, a larger depth is beneficial to transfer the plasma to the holder surface and suppress the polycrystalline diamond rim around the seed edge. However, the plasma density at the edge decreases drastically when the depth is too large, resulting in the growth of a vicinal grain plane and the reduction of surface area. By adopting an appropriate spatial location, the size of single-crystal diamond can be increased from 7 mm × 7 mm × 0.35 mm to 8.6 mm × 8.6 mm × 2.8 mm without the polycrystalline diamond rim.

Key words: MPCVD, single-crystal diamond growth, enclosed-type holder, growth mode modulation

中图分类号:  (Diamond)

  • 81.05.ug
77.84.Bw (Elements, oxides, nitrides, borides, carbides, chalcogenides, etc.) 73.40.Kp (III-V semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions) 82.80.Pv (Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.))