中国物理B ›› 2022, Vol. 31 ›› Issue (3): 34202-034202.doi: 10.1088/1674-1056/ac1e10

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New multiplexed system for synchronous measurement of out-of-plane deformation and two orthogonal slopes

Yonghong Wang(王永红)1,2, Xiao Zhang(张肖)1, Qihan Zhao(赵琪涵)1, Yanfeng Yao(姚彦峰)1, Peizheng Yan(闫佩正)1,†, and Biao Wang(王标)1   

  1. 1 School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China;
    2 Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei 230009, China
  • 收稿日期:2021-05-26 修回日期:2021-08-10 接受日期:2021-08-17 出版日期:2022-02-22 发布日期:2022-02-14
  • 通讯作者: Peizheng Yan E-mail:pzyan@hfut.edu.cn
  • 基金资助:
    Project supported by the National Key Research and Development Program of China (Grant No. 2016YFF0101803), the Hefei Municipal Natural Science Foundation (Grant No. 2021017), the Fundamental Research Funds for the Central Universities of China (Grant No. JZ2019HGTB0076).

New multiplexed system for synchronous measurement of out-of-plane deformation and two orthogonal slopes

Yonghong Wang(王永红)1,2, Xiao Zhang(张肖)1, Qihan Zhao(赵琪涵)1, Yanfeng Yao(姚彦峰)1, Peizheng Yan(闫佩正)1,†, and Biao Wang(王标)1   

  1. 1 School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China;
    2 Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei 230009, China
  • Received:2021-05-26 Revised:2021-08-10 Accepted:2021-08-17 Online:2022-02-22 Published:2022-02-14
  • Contact: Peizheng Yan E-mail:pzyan@hfut.edu.cn
  • Supported by:
    Project supported by the National Key Research and Development Program of China (Grant No. 2016YFF0101803), the Hefei Municipal Natural Science Foundation (Grant No. 2021017), the Fundamental Research Funds for the Central Universities of China (Grant No. JZ2019HGTB0076).

摘要: We propose a novel system for synchronous measurement of out-of-plane deformation and two orthogonal slopes using a single camera. The linearly polarized reference beam introduced by an optical fiber interferes with the unpolarized object beam to measure the out-of-plane deformation. A modified Mach—Zehnder interferometer is used to measure the two orthogonal slopes of the out-of-plane deformation. One of the object beams of the Mach—Zehnder interferometer is an unpolarized beam, and the other object beam is split into two orthogonal linearly polarized object beams by a polarizing prism. The two beams are orthogonally polarized. Hence, they will not interfere with each other. The two polarized beams respectively interfere with the unpolarized beam to simultaneously measure the two orthogonal slopes of the out-of-plane deformation. In addition, the imaging lens and apertures are respectively placed in three optical paths to independently control the carrier frequencies and shearing amounts. The effectiveness of this method can be proved by measuring two pressure-loaded circular plates.

关键词: digital speckle pattern interferometry, digital shearography, digital speckle pattern interferometry, simultaneous measurement of displacement and two orthogonal slopes

Abstract: We propose a novel system for synchronous measurement of out-of-plane deformation and two orthogonal slopes using a single camera. The linearly polarized reference beam introduced by an optical fiber interferes with the unpolarized object beam to measure the out-of-plane deformation. A modified Mach—Zehnder interferometer is used to measure the two orthogonal slopes of the out-of-plane deformation. One of the object beams of the Mach—Zehnder interferometer is an unpolarized beam, and the other object beam is split into two orthogonal linearly polarized object beams by a polarizing prism. The two beams are orthogonally polarized. Hence, they will not interfere with each other. The two polarized beams respectively interfere with the unpolarized beam to simultaneously measure the two orthogonal slopes of the out-of-plane deformation. In addition, the imaging lens and apertures are respectively placed in three optical paths to independently control the carrier frequencies and shearing amounts. The effectiveness of this method can be proved by measuring two pressure-loaded circular plates.

Key words: digital speckle pattern interferometry, digital shearography, digital speckle pattern interferometry, simultaneous measurement of displacement and two orthogonal slopes

中图分类号:  (Optical system design)

  • 42.15.Eq
42.30.Ms (Speckle and moiré patterns) 42.40.-i (Holography) 42.87.Bg (Phase shifting interferometry)