Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry-Perot cavity

doi:10.1088/1674-1056/ab427c

中国物理B ›› 2019, Vol. 28 ›› Issue (10): 104209-104209.doi: 10.1088/1674-1056/ab427c

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇下一篇

Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry-Perot cavity

Li-Fei Tian(田立飞), Ying-Xin Kuang(匡迎新), Zhong-Chao Fan(樊中朝), Zhi-Yong Li(李智勇)

1 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
2 Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

收稿日期:2019-06-19 修回日期:2019-07-10 出版日期:2019-10-05 发布日期:2019-10-05
通讯作者: Zhong-Chao Fan, Zhi-Yong Li E-mail:zcfan@semi.ac.cn;lizhy@semi.ac.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61575076 and 61804148) and the National Key Research and Development Plan of China (Grant No. 2016YFB0402502).

Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry-Perot cavity

Li-Fei Tian(田立飞)^1,2, Ying-Xin Kuang(匡迎新)^1,2, Zhong-Chao Fan(樊中朝)², Zhi-Yong Li(李智勇)¹

1 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
2 Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Received:2019-06-19 Revised:2019-07-10 Online:2019-10-05 Published:2019-10-05
Contact: Zhong-Chao Fan, Zhi-Yong Li E-mail:zcfan@semi.ac.cn;lizhy@semi.ac.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61575076 and 61804148) and the National Key Research and Development Plan of China (Grant No. 2016YFB0402502).

摘要/Abstract

摘要：

The extinction ratio and insertion loss of spatial light modulator are subject to the material problem, thus limiting its applications. One reflection-type silicon-based spatial light modulator with high reflective materials outside the Fabry-Perot cavity is demonstrated in this paper. The reflectivity values of the outside-cavity materials with different film layer numbers are simulated. The reflectivity values of 6-pair Ta₂O₅/SiO₂ films at 1550 nm are experimentally verified to be as high as 99.9%. The surfaces of 6-pair Ta₂O₅/SiO₂ films are smooth:their root-mean-square roughness values are as small as 0.53 nm. The insertion loss of the device at 1550 nm is only 1.2 dB. The high extinction ratio of the device at 1550 nm and 11 V is achieved to be 29.7 dB. The spatial light modulator has a high extinction ratio and low insertion loss for applications.

关键词: spatial light modulator, high reflective materials, silicon-based, Fabry-Perot cavity

Abstract:

Key words: spatial light modulator, high reflective materials, silicon-based, Fabry-Perot cavity

中图分类号: (Optical processors, correlators, and modulators)

42.79.Hp

42.79.Fm (Reflectors, beam splitters, and deflectors) 95.85.Jq (Near infrared (0.75-3 μm)) 71.20.Mq (Elemental semiconductors)

田立飞, 匡迎新, 樊中朝, 李智勇. Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry-Perot cavity[J]. 中国物理B, 2019, 28(10): 104209-104209.

Li-Fei Tian(田立飞), Ying-Xin Kuang(匡迎新), Zhong-Chao Fan(樊中朝), Zhi-Yong Li(李智勇). Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry-Perot cavity[J]. Chin. Phys. B, 2019, 28(10): 104209-104209.

参考文献 43

[40]	Haelbich R P, Segmuller A and Spiller E 1979 Appl. Phys. Lett. 34 184 doi: 10.1063/1.90743
[1]	Feng F, White I H and Wilkinson T D 2013 J. Lightwave Technol. 31 2001 doi: 10.1109/JLT.2013.2262372
[41]	Cho H J, Shin M J and Lee J C 2006 Appl. Opt. 45 1440 doi: 10.1364/AO.45.001440
[2]	Gailele L, Dudley A and Forbes A 2018 Conference on Laser Beam Shaping XVⅢ, August 20-21, 2018, San Diego, USA, p. 1074414
[42]	Whitehead M, Parry G and Wheatley P 1989 IEE P.-J. Optoelectron. 136 52 doi: 10.1049/ip-j.1989.0012
[3]	Mills B, Thomson D J, Mashanovich G Z, Reed G T, Vynck K, Muskens O L, Lalanne P and Bruck R 2016 Optica 3 396 doi: 10.1364/OPTICA.3.000396
[43]	Chandrasekhar S, Vengurlekar A S, Roy S K and Karulkar V T 1988 J. Appl. Phys. 63 2072 doi: 10.1063/1.341110
[4]	Lutkenhaus J, Lowell D, George D, Zhang H, Lin Y and Lin Y 2016 Micromachines 7 59 doi: 10.3390/mi7040059
[5]	Ni H, Zou L, Guo Q and Ding X 2017 Opt. Express 25 2872 doi: 10.1364/OE.25.002872
[6]	Li L, Xie G, Ren Y, Ahmed N, Huang H, Zhao Z, Liao P, Lavery M P, Yan Y and Bao C 2016 Appl. Opt. 55 2098 doi: 10.1364/AO.55.002098
[7]	Wang Y, Ren Y, Chen L, Song C, Li C, Zhang C, Xu D and Yao J 2018 Chin. Phys. B 27 114204 doi: 10.1088/1674-1056/27/11/114204
[8]	Du X, Chang J, Zhang Y, Wang X, Zhang B, Gao L and Xiao L 2015 Opt. Express 23 26032 doi: 10.1364/OE.23.026032
[9]	Ouyang B, Hou W, Caimi F M, Dalgleish F R, Vuorenkoski A K, Gong S and Britton W 2015 Conference on Compressive Sensing IV, April 22-24, 2015, Baltimore, USA, p. 94840I
[10]	Gutierrez F A, Perry P, Martin E P, Ellis A D, Smyth F and Barry L P 2015 J. Lightwave Technol. 33 5073 doi: 10.1109/JLT.2015.2496285
[11]	Mathis A, Froehly L, Toenger S, Dias F, Genty G and Dudley J M 2015 Sci. Rep. 5 12822 doi: 10.1038/srep12822
[12]	Sun S, Zhang R, Peng J, Narayana V K, Dalir H, El-Ghazawi T and Sorger V J 2018 Opt. Express 26 8252 doi: 10.1364/OE.26.008252
[13]	Xia X W, Ewing T K, Serati S A, Fu Y J, Zhou R, Neff J A, and Barnes F S 2003 Conference on Active and Passive Optical Components for WDM Communications Ⅲ, August 14, 2003, Orlando, USA, p. 95
[14]	Wang H T, Zhou D B, Zhang R K, Lu D, Zhao L J, Zhu H L, Wang W and Ji C 2015 Chin. Phys. Lett. 32 084203 doi: 10.1088/0256-307X/32/8/084203
[15]	Zhou D B, Wang H T, Zhang R K, Wang B J, Bian J, An X, Lu D, Zhao L J, Zhu H L, Ji C and Wang W 2015 Chin. Phys. Lett. 32 054205 doi: 10.1088/0256-307X/32/5/054205
[16]	Cao Y M, Wu B J, Wan F and Qiu K 2018 Acta Phys. Sin. 67 094208 (in Chinese)
[17]	Liu Y K, Wang X L, Su R T, Ma P F, Zhang H W, Zhou P and Si L 2017 Acta Phys. Sin. 66 234203 (in Chinese)
[18]	Liu X, Yang L, Ma J, Li C, Jin W and Bi W 2018 Chin. Phys. B 27 104206 doi: 10.1088/1674-1056/27/10/104206
[19]	Imura T, Koga H, Lim P B, Umezawa H, Horimai H and Inoue M 2006 Conference on Optical Information Systems IV, August 16-17, 2006, San Diego, USA, p. 631115
[20]	Takizawa K, Kikuchi H, Fujikake H and Okada M 1990 Appl. Phys. Lett. 56 999 doi: 10.1063/1.102575
[21]	Pan R P, Shieu C R, Lu W L, Huang M J and Pan C L 2001 Conference on Spatial Light Modulators, July 31-August 01, 2001, San Diego, USA, p. 111
[22]	Takahashi K, Kawanishi F, Mito S, Takagi H, Shin K H, Kim J, Lim P B, Uchida H and Inoue M 2008 J. Appl. Phys. 103 07B331
[23]	Hwang C Y, Lee S Y, Kim Y H, Kim T Y, Kim G H, Yang J H, Pi J E, Choi J H, Choi K, Kim H O and Hwang C S 2017 Appl. Phys. Express 10 122201 doi: 10.7567/APEX.10.122201
[24]	Lee G, Nouman M T, Hwang J H, Kim H W and Jang J H 2018 AIP Adv. 8 1401
[25]	Zeng C, Guo J and Liu X 2014 Appl. Phys. Lett. 105 121103 doi: 10.1063/1.4895633
[26]	Hasan M and Hall T 2017 J. Mod. Opt. 64 2268 doi: 10.1080/09500340.2017.1344739
[27]	Xu X, Zhou Y, Yuan Y S, Wang J, Xu H F and Qu J 2018 AIP Adv. 8 125007 doi: 10.1063/1.5049857
[28]	Zeiler M, Detraz S, Olantera L, Pezzullo G, El Nasr-Storey S S, Sigaud C, Soos C, Troska J and Vasey F 2016 J. Instrum. 11 C01040
[29]	Xu E M, Zhang Z X and Li P L 2017 Chin. Phys. Lett. 34 014203 doi: 10.1088/0256-307X/34/1/014203
[30]	Wang Y X, Li H L, Wang D Y, Li J N, Zhong X, Zhou T, Yang D C and Rong L 2017 Acta Phys. Sin. 66 098401 (in Chinese)
[31]	Guo J and Dai D 2018 Chin. Phys. B 27 104208 doi: 10.1088/1674-1056/27/10/104208
[32]	Sun T, Kim J, Yuk J M, Zettl A, Wang F and Changhasnain C 2016 Opt. Express 24 26035 doi: 10.1364/OE.24.026035
[33]	Greenlee C, Luo J, Leedy K, Bayraktaroglu B, Norwood R A, Fallahi M, Jen A K Y and Peyghambarian N 2011 Opt. Express 19 12750 doi: 10.1364/OE.19.012750
[34]	Worchesky T L, Ritter K J, Martin R and Lane B 1996 Appl. Opt. 35 1180 doi: 10.1364/AO.35.001180
[35]	Panezai S, Wang D, Zhao J, Wang Y and Rong L 2014 Appl. Opt. 53 105 doi: 10.1364/AO.53.00G105
[36]	Bleha W P and Lei L A 2013 Conference on Display Technologies and Applications for Defense, Security, and Avionics VⅡ, May 02, 2013, Baltimore, USA, p. 87360A
[37]	Horie Y, Arbabi A, Arbabi E, Karnali S M and Faraon A 2018 ACS Photon. 5 1711 doi: 10.1021/acsphotonics.7b01073
[38]	Tang J, Gu P, Liu X and Li H 1993 Appl. Opt. 32 5492 doi: 10.1364/AO.32.005492
[39]	Amra C, Grezesbesset C and Bruel L 1993 Appl. Opt. 32 5492 doi: 10.1364/AO.32.005492
[40]	Haelbich R P, Segmuller A and Spiller E 1979 Appl. Phys. Lett. 34 184 doi: 10.1063/1.90743
[41]	Cho H J, Shin M J and Lee J C 2006 Appl. Opt. 45 1440 doi: 10.1364/AO.45.001440
[42]	Whitehead M, Parry G and Wheatley P 1989 IEE P.-J. Optoelectron. 136 52 doi: 10.1049/ip-j.1989.0012
[43]	Chandrasekhar S, Vengurlekar A S, Roy S K and Karulkar V T 1988 J. Appl. Phys. 63 2072 doi: 10.1063/1.341110

Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry-Perot cavity

Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry-Perot cavity

RichHTML

PDF (PC)

赞

可视化

摘要/Abstract

引用本文

使用本文

参考文献 43

相关文章 10

Metrics

本文评价

推荐阅读 0

[1]	刘振, 贾维国, 王红玉, 汪洋, 门克内木乐, 张俊萍. Effect of dark soliton on the spectral evolution of bright soliton in a silicon-on-insulator waveguide[J]. 中国物理B, 2020, 29(6): 64212-064212.
[2]	刘振, 贾维国, 汪洋, 王红玉, 门克内木乐, 张俊萍. Propagation characteristics of parallel dark solitons in silicon-on-insulator waveguide[J]. 中国物理B, 2020, 29(1): 14203-014203.
[3]	王迪, 丁孟, 皮浩洋, 李璇, 杨飞, 叶青, 蔡海文, 魏芳. Influence of intra-cavity loss on transmission characteristics of fiber Bragg grating Fabry-Perot cavity[J]. 中国物理B, 2018, 27(2): 24207-024207.
[4]	任志君, 何晋平, 施逸乐. Generation of Mathieu beams using angular pupil modulation[J]. 中国物理B, 2018, 27(12): 124201-124201.
[5]	王与烨, 任宇琛, 陈霖宇, 宋词, 李长昭, 张超, 徐德刚, 姚建铨. Terahertz two-pixel imaging based on complementary compressive sensing[J]. 中国物理B, 2018, 27(11): 114204-114204.
[6]	周静, 沈萌, 杜澜, 邓彩松, 倪海彬, 王鸣. Different optical properties in different periodic slot cavity geometrical morphologies[J]. 中国物理B, 2016, 25(9): 97301-097301.
[7]	刘翔, 张健, 吴丽莹, 甘雨. Fast generation of controllable equal-intensity four beams based on isosceles triangle multilevel phase grating realized by liquid crystal spatial light modulator[J]. 中国物理B, 2011, 20(2): 24211-024211.
[8]	王伟, 黄北举, 董赞, 陈弘达. Multifunctional silicon-based light emitting device in standard complementary metal–oxide–semiconductor technology[J]. 中国物理B, 2011, 20(1): 18503-018503.
[9]	周琦, 陆俊发, 印建平. Matter-wave interference in an axial triple-well optical dipole trap[J]. 中国物理B, 2010, 19(9): 93202-093202.
[10]	周琦, 陆俊发, 印建平. Controllable optical multi-well trap and its optical lattices using compounded cosine patterns[J]. 中国物理B, 2010, 19(12): 123203-123203.