Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma

doi:10.1088/1674-1056/24/12/125201

中国物理B ›› 2015, Vol. 24 ›› Issue (12): 125201-125201.doi: 10.1088/1674-1056/24/12/125201

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇下一篇

Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma

H. Kakati^a, S. M. Borah^b

a Jorhat Institute of Science and Technology, Jorhat 10, Assam, India;
b Department of Applied Sciences, Gauhati University, Jalukbari, Guwahati-781014, Assam, India

收稿日期:2015-06-25 修回日期:2015-08-13 出版日期:2015-12-05 发布日期:2015-12-05
通讯作者: S. M. Borah E-mail:sankarmoni@gmail.com
基金资助:
Project supported by the Department of Science and Technology, Government of India and Council of Scientific and Industrial Research, India.

Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma

H. Kakati^a, S. M. Borah^b

a Jorhat Institute of Science and Technology, Jorhat 10, Assam, India;
b Department of Applied Sciences, Gauhati University, Jalukbari, Guwahati-781014, Assam, India

Received:2015-06-25 Revised:2015-08-13 Online:2015-12-05 Published:2015-12-05
Contact: S. M. Borah E-mail:sankarmoni@gmail.com
Supported by:
Project supported by the Department of Science and Technology, Government of India and Council of Scientific and Industrial Research, India.

摘要/Abstract

摘要： In order to make sufficient use of reactive cylindrical magnetron plasma for depositing compound thin films, it is necessary to characterize the hysteresis behavior of the discharge. Cylindrical magnetron plasmas with different targets namely titanium and aluminium are studied in an argon/oxygen and an argon/nitrogen gas environment respectively. The aluminium and titanium emission lines are observed at different flows of reactive gases. The emission intensity is found to decrease with the increase of the reactive gas flow rate. The hysteresis behavior of reactive cylindrical magnetron plasma is studied by determining the variation of discharge voltage with increasing and then reducing the flow rate of reactive gas, while keeping the discharge current constant at 100 mA. Distinct hysteresis is found to be formed for the aluminium target and reactive gas oxygen. For aluminium/nitrogen, titanium/oxygen and titanium/nitrogen, there is also an indication of the formation of hysteresis; however, the characteristics of variation from metallic to reactive mode are different in different cases. The hysteresis behaviors are different for aluminium and titanium targets with the oxygen and nitrogen reactive gases, signifying the difference in reactivity between them. The effects of the argon flow rate and magnetic field on the hysteresis are studied and explained.

关键词: cylindrical magnetron, sputtering, reactive mode, hysteresis

Abstract: In order to make sufficient use of reactive cylindrical magnetron plasma for depositing compound thin films, it is necessary to characterize the hysteresis behavior of the discharge. Cylindrical magnetron plasmas with different targets namely titanium and aluminium are studied in an argon/oxygen and an argon/nitrogen gas environment respectively. The aluminium and titanium emission lines are observed at different flows of reactive gases. The emission intensity is found to decrease with the increase of the reactive gas flow rate. The hysteresis behavior of reactive cylindrical magnetron plasma is studied by determining the variation of discharge voltage with increasing and then reducing the flow rate of reactive gas, while keeping the discharge current constant at 100 mA. Distinct hysteresis is found to be formed for the aluminium target and reactive gas oxygen. For aluminium/nitrogen, titanium/oxygen and titanium/nitrogen, there is also an indication of the formation of hysteresis; however, the characteristics of variation from metallic to reactive mode are different in different cases. The hysteresis behaviors are different for aluminium and titanium targets with the oxygen and nitrogen reactive gases, signifying the difference in reactivity between them. The effects of the argon flow rate and magnetic field on the hysteresis are studied and explained.

Key words: cylindrical magnetron, sputtering, reactive mode, hysteresis

中图分类号: (Elementary processes in plasmas)

52.20.-j

51.60.+a (Magnetic properties) 52.20.Hv (Atomic, molecular, ion, and heavy-particle collisions) 52.55.-s (Magnetic confinement and equilibrium)

H. Kakati, S. M. Borah. Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma[J]. 中国物理B, 2015, 24(12): 125201-125201.

H. Kakati, S. M. Borah. Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma[J]. Chin. Phys. B, 2015, 24(12): 125201-125201.

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Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma

Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma

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