中国物理B ›› 2013, Vol. 22 ›› Issue (11): 118503-118503.doi: 10.1088/1674-1056/22/11/118503
• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇 下一篇
李冲, 薛春来, 李传波, 刘智, 成步文, 王启明
Li Chong (李冲), Xue Chun-Lai (薛春来), Li Chuan-Bo (李传波), Liu Zhi (刘智), Cheng Bu-Wen (成步文), Wang Qi-Ming (王启明)
摘要: Uni-traveling-carrier photodiodes (UTC-PDs) with ultrafast response and high saturation output are reported. A gradient doping layer and a narrow InP cliff layer were introduced to enhance the saturation and bandwidth characteristics. We measured the dark current, photo response, bandwidth, and saturation current of the fabricated UTC devices. For a 15-μm-diameter device, the dark current was 3.5 nA at a reverse bias of 1 V, and the 3-dB bandwidth was 17.2 GHz at a reverse bias of 5 V, which are comparable to the theoretically values. The maximum responsivity at 1.55 μm was 0.32 A/W. The saturation output current was over 19.0 mA without bias.
中图分类号: (Photodetectors (including infrared and CCD detectors))