Local thermal conductivity of polycrystalline AlN ceramics measured by scanning thermal microscopy and complementary scanning electron microscopy techniques

doi:10.1088/1674-1056/21/1/016501

中国物理B ›› 2012, Vol. 21 ›› Issue (1): 16501-016501.doi: 10.1088/1674-1056/21/1/016501

Local thermal conductivity of polycrystalline AlN ceramics measured by scanning thermal microscopy and complementary scanning electron microscopy techniques

R. Heiderhoff¹, A. K. Geinzer¹, L. J. Balk¹, 张跃飞², 王丽², 卫斌², 吉元², 韩晓东², 张泽³

(1)Department of Electronics, Faculty of Electrical, Information and Media Engineering, University of Wuppertal, Wuppertal D-42119, Germany; (2)Institute of Microstructure and Property of Advanced Materials, Beijing University of Technology, Beijing 100124, China; (3)Institute of Microstructure and Property of Advanced Materials, Beijing University of Technology, Beijing 100124, China; Department of Materials Science, Zhejiang University, Hangzhou 300038, China

收稿日期:2011-03-11 修回日期:2011-07-26 出版日期:2012-01-15 发布日期:2012-01-20
基金资助:
Project supported by the National Basic Research Program of China (Grant No. 2009CB623702), the National Natural Science Foundation of China (Grant No. 10904001), and the Key Project Funding Scheme of Beijing Municipal Education Committee, China (Grant No

Local thermal conductivity of polycrystalline AlN ceramics measured by scanning thermal microscopy and complementary scanning electron microscopy techniques

Zhang Yue-Fei(张跃飞)^a), Wang Li(王丽)^a), R. Heiderhoff^b), A.~K. Geinzer^b), Wei Bin(卫斌)^a), Ji Yuan(吉元)^a), Han Xiao-Dong(韩晓东)^a)†, L.~J. Balk^b), and Zhang Ze(张泽)^a)c)

^a Institute of Microstructure and Property of Advanced Materials, Beijing University of Technology, Beijing 100124, China; ^b Department of Electronics, Faculty of Electrical, Information and Media Engineering, University of Wuppertal, Wuppertal D-42119, Germany; ^c Department of Materials Science, Zhejiang University, Hangzhou 300038, China

Received:2011-03-11 Revised:2011-07-26 Online:2012-01-15 Published:2012-01-20
Supported by:
Project supported by the National Basic Research Program of China (Grant No. 2009CB623702), the National Natural Science Foundation of China (Grant No. 10904001), and the Key Project Funding Scheme of Beijing Municipal Education Committee, China (Grant No

摘要/Abstract

摘要： The local thermal conductivity of polycrystalline aluminum nitride (AlN) ceramics is measured and imaged by using a scanning thermal microscope (SThM) and complementary scanning electron microscope (SEM) based techniques at room temperature. The quantitative thermal conductivity for the AlN sample is gained by using a SThM with a spatial resolution of sub-micrometer scale through using the 3ω method. A thermal conductivity of 308 W/m·K within grains corresponding to that of high-purity single crystal AlN is obtained. The slight differences in thermal conduction between the adjacent grains are found to result from crystallographic misorientations, as demonstrated in the electron backscattered diffraction. A much lower thermal conductivity at the grain boundary is due to impurities and defects enriched in these sites, as indicated by energy dispersive X-ray spectroscopy.

关键词: thermal conductivity, AlN ceramics, scanning thermal microscopy, scanning electron microscopy

Abstract: The local thermal conductivity of polycrystalline aluminum nitride (AlN) ceramics is measured and imaged by using a scanning thermal microscope (SThM) and complementary scanning electron microscope (SEM) based techniques at room temperature. The quantitative thermal conductivity for the AlN sample is gained by using a SThM with a spatial resolution of sub-micrometer scale through using the 3ω method. A thermal conductivity of 308 W/m·K within grains corresponding to that of high-purity single crystal AlN is obtained. The slight differences in thermal conduction between the adjacent grains are found to result from crystallographic misorientations, as demonstrated in the electron backscattered diffraction. A much lower thermal conductivity at the grain boundary is due to impurities and defects enriched in these sites, as indicated by energy dispersive X-ray spectroscopy.

Key words: thermal conductivity, AlN ceramics, scanning thermal microscopy, scanning electron microscopy

中图分类号: (Thermal properties of crystalline solids)

65.40.-b

66.70.Df (Metals, alloys, and semiconductors)

张跃飞, 王丽, R. Heiderhoff, A. K. Geinzer, 卫斌, 吉元, 韩晓东, L. J. Balk, 张泽. Local thermal conductivity of polycrystalline AlN ceramics measured by scanning thermal microscopy and complementary scanning electron microscopy techniques[J]. 中国物理B, 2012, 21(1): 16501-016501.

Zhang Yue-Fei(张跃飞), Wang Li(王丽), R. Heiderhoff, A. K. Geinzer, Wei Bin(卫斌), Ji Yuan(吉元), Han Xiao-Dong(韩晓东), L.J. Balk, and Zhang Ze(张泽) . Local thermal conductivity of polycrystalline AlN ceramics measured by scanning thermal microscopy and complementary scanning electron microscopy techniques[J]. Chin. Phys. B, 2012, 21(1): 16501-016501.

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Local thermal conductivity of polycrystalline AlN ceramics measured by scanning thermal microscopy and complementary scanning electron microscopy techniques

Local thermal conductivity of polycrystalline AlN ceramics measured by scanning thermal microscopy and complementary scanning electron microscopy techniques

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