Influences of surface effects and large deformation on the resonant properties of ultrathin silicon nanocantilevers

doi:10.1088/1674-1056/21/1/016203

中国物理B ›› 2012, Vol. 21 ›› Issue (1): 16203-016203.doi: 10.1088/1674-1056/21/1/016203

Influences of surface effects and large deformation on the resonant properties of ultrathin silicon nanocantilevers

顾芳¹, 张加宏², 李敏², 刘清惓²

(1)College of Math & Physics, Nanjing University of Information Science & Technology, Nanjing 210044, China; (2)Jiangsu Key Laboratory of Meteorological Observation and Information Processing, Nanjing University of Information Science & Technology, Nanjing 210044, China

收稿日期:2011-08-10 修回日期:2011-10-14 出版日期:2012-01-15 发布日期:2012-01-20
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 41075026), the Open Research Fund of Key Laboratory of MEMS of Ministry of Education, Southeast University, China (Grant Nos. 2009-03 and 2010-02), the Special Fund for Meteo

Influences of surface effects and large deformation on the resonant properties of ultrathin silicon nanocantilevers

Zhang Jia-Hong(张加宏)^a)^†, Li Min(李敏)^a), Gu Fang(顾芳)^b), and Liu Qing-Quan(刘清惓)^a)

^a Jiangsu Key Laboratory of Meteorological Observation and Information Processing, Nanjing University of Information Science & Technology, Nanjing 210044, China; ^b College of Math & Physics, Nanjing University of Information Science & Technology, Nanjing 210044, China

Received:2011-08-10 Revised:2011-10-14 Online:2012-01-15 Published:2012-01-20
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 41075026), the Open Research Fund of Key Laboratory of MEMS of Ministry of Education, Southeast University, China (Grant Nos. 2009-03 and 2010-02), the Special Fund for Meteo

摘要/Abstract

摘要： The purpose of the present work is to quantify the influences of the discrete nature, the surface effects, and the large deformation on the bending resonant properties of long and ultrathin 〈100〉 silicon nanocantilevers. We accomplish this by using an analytical semi-continuum Keating model within the framework of nonlinear, finite deformation kinematics. The semi-continuum model shows that the elastic behaviors of the silicon nanocantilevers are size-dependent and surface-dependent, which agrees well with the molecular dynamics results. It also indicates that the dominant effect on the fundamental resonant frequency shift of the silicon nanocantilever is adsorption-induced surface stress, followed by the discrete nature and surface reconstruction, whereas surface relaxation has the least effect. In particular, it is found that a large deformation tends to increase the nonlinear fundamental frequency of the silicon nanocantilever, depending not only on its size but also on the surface effects. Finally, the resonant frequency shifts due to the adsorption-induced surface stress predicted by the current model are quantitatively compared with those obtained from the experimental measurement and the other existing approach. It is noticed that the length-to-thickness ratio is the key parameter that correlates the deviations in the resonant frequencies predicted from the current model and the empirical formula.

关键词: resonant properties, elastic properties, surface effects, silicon nanocantilevers

Abstract: The purpose of the present work is to quantify the influences of the discrete nature, the surface effects, and the large deformation on the bending resonant properties of long and ultrathin 〈100〉 silicon nanocantilevers. We accomplish this by using an analytical semi-continuum Keating model within the framework of nonlinear, finite deformation kinematics. The semi-continuum model shows that the elastic behaviors of the silicon nanocantilevers are size-dependent and surface-dependent, which agrees well with the molecular dynamics results. It also indicates that the dominant effect on the fundamental resonant frequency shift of the silicon nanocantilever is adsorption-induced surface stress, followed by the discrete nature and surface reconstruction, whereas surface relaxation has the least effect. In particular, it is found that a large deformation tends to increase the nonlinear fundamental frequency of the silicon nanocantilever, depending not only on its size but also on the surface effects. Finally, the resonant frequency shifts due to the adsorption-induced surface stress predicted by the current model are quantitatively compared with those obtained from the experimental measurement and the other existing approach. It is noticed that the length-to-thickness ratio is the key parameter that correlates the deviations in the resonant frequencies predicted from the current model and the empirical formula.

Key words: resonant properties, elastic properties, surface effects, silicon nanocantilevers

中图分类号: (Mechanical properties of nanoscale systems)

62.25.-g

62.40.+i (Anelasticity, internal friction, stress relaxation, and mechanical resonances) 68.35.B- (Structure of clean surfaces (and surface reconstruction)) 61.46.Km (Structure of nanowires and nanorods (long, free or loosely attached, quantum wires and quantum rods, but not gate-isolated embedded quantum wires))

张加宏, 李敏, 顾芳, 刘清惓. Influences of surface effects and large deformation on the resonant properties of ultrathin silicon nanocantilevers[J]. 中国物理B, 2012, 21(1): 16203-016203.

Zhang Jia-Hong(张加宏), Li Min(李敏), Gu Fang(顾芳), and Liu Qing-Quan(刘清惓) . Influences of surface effects and large deformation on the resonant properties of ultrathin silicon nanocantilevers[J]. Chin. Phys. B, 2012, 21(1): 16203-016203.

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Influences of surface effects and large deformation on the resonant properties of ultrathin silicon nanocantilevers

Influences of surface effects and large deformation on the resonant properties of ultrathin silicon nanocantilevers

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