中国物理B ›› 2009, Vol. 18 ›› Issue (6): 2412-2419.doi: 10.1088/1674-1056/18/6/049

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Self-consistent three-dimensional modeling and simulation of large-scale rectangular surface-wave plasma source

蓝朝晖1, 胡希伟1, 陈兆权1, 刘明海1, 蓝朝桢2   

  1. (1)College of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, China; (2)Institute of Surveying $ &$ Mapping, Information Engineering University, Zhengzhou 450052, China
  • 收稿日期:2008-10-23 修回日期:2008-11-25 出版日期:2009-06-20 发布日期:2009-06-20
  • 基金资助:
    Project supported by the Special Fund of National High-Tech Development and Research Plan (Grant No 2008AA12A214).

Self-consistent three-dimensional modeling and simulation of large-scale rectangular surface-wave plasma source

Lan Chao-Hui(蓝朝晖)a)†, Lan Chao-Zhen(蓝朝桢)b), Hu Xi-Wei(胡希伟)a), Chen Zhao-Quan(陈兆权)a), and Liu Ming-Hai(刘明海)a)   

  1. a College of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, China; b Institute of Surveying & Mapping, Information Engineering University, Zhengzhou 450052, China
  • Received:2008-10-23 Revised:2008-11-25 Online:2009-06-20 Published:2009-06-20
  • Supported by:
    Project supported by the Special Fund of National High-Tech Development and Research Plan (Grant No 2008AA12A214).

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摘要： A self-consistent and three-dimensional (3D) model of argon discharge in a large-scale rectangular surface-wave plasma (SWP) source is presented in this paper, which is based on the finite-difference time-domain (FDTD) approximation to Maxwell's equations self-consistently coupled with a fluid model for plasma evolution. The discharge characteristics at an input microwave power of 1200~W and a filling gas pressure of 50~Pa in the SWP source are analyzed. The simulation shows the time evolution of deposited power density at different stages, and the 3D distributions of electron density and temperature in the chamber at steady state. In addition, the results show that there is a peak of plasma density approximately at a vertical distance of 3~cm from the quartz window.

关键词: FDTD method, surface wave plasma, fluid model

Abstract: A self-consistent and three-dimensional (3D) model of argon discharge in a large-scale rectangular surface-wave plasma (SWP) source is presented in this paper, which is based on the finite-difference time-domain (FDTD) approximation to Maxwell's equations self-consistently coupled with a fluid model for plasma evolution. The discharge characteristics at an input microwave power of 1200 W and a filling gas pressure of 50 Pa in the SWP source are analyzed. The simulation shows the time evolution of deposited power density at different stages, and the 3D distributions of electron density and temperature in the chamber at steady state. In addition, the results show that there is a peak of plasma density approximately at a vertical distance of 3 cm from the quartz window.

Key words: FDTD method, surface wave plasma, fluid model

中图分类号:  (Plasma sources)

  • 52.50.Dg
52.25.-b (Plasma properties) 52.35.Hr (Electromagnetic waves (e.g., electron-cyclotron, Whistler, Bernstein, upper hybrid, lower hybrid)) 52.65.Kj (Magnetohydrodynamic and fluid equation) 52.65.Ww (Hybrid methods) 52.80.-s (Electric discharges)