中国物理B ›› 2009, Vol. 18 ›› Issue (6): 2412-2419.doi: 10.1088/1674-1056/18/6/049
蓝朝晖1, 胡希伟1, 陈兆权1, 刘明海1, 蓝朝桢2
Lan Chao-Hui(蓝朝晖)a)†, Lan Chao-Zhen(蓝朝桢)b), Hu Xi-Wei(胡希伟)a), Chen Zhao-Quan(陈兆权)a), and Liu Ming-Hai(刘明海)a)
摘要: A self-consistent and three-dimensional (3D) model of argon discharge in a large-scale rectangular surface-wave plasma (SWP) source is presented in this paper, which is based on the finite-difference time-domain (FDTD) approximation to Maxwell's equations self-consistently coupled with a fluid model for plasma evolution. The discharge characteristics at an input microwave power of 1200~W and a filling gas pressure of 50~Pa in the SWP source are analyzed. The simulation shows the time evolution of deposited power density at different stages, and the 3D distributions of electron density and temperature in the chamber at steady state. In addition, the results show that there is a peak of plasma density approximately at a vertical distance of 3~cm from the quartz window.
中图分类号: (Plasma sources)