中国物理B ›› 2008, Vol. 17 ›› Issue (9): 3185-3188.doi: 10.1088/1674-1056/17/9/005

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Simulation solution for micro droplet impingementon a flat dry surface

韩瑞津1, 孙震海2   

  1. (1)Grace Semiconductor Manufacture Corporation, Shanghai 201203, China; (2)Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;Grace Semiconductor Manufacture Corporation, Shanghai 201203, China;Graduate School of Chinese Academy of Sciences, Beijing 100039, China
  • 收稿日期:2007-12-19 修回日期:2008-02-15 出版日期:2008-09-08 发布日期:2008-09-08

Simulation solution for micro droplet impingementon a flat dry surface

Sun Zhen-Hai(孙震海)a)b)c)† and Han Rui-Jing(韩瑞津)b)   

  1. a Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; bGrace Semiconductor Manufacture Corporation, Shanghai 201203, China ; b Graduate School of Chinese Academy of Sciences, Beijing 100039, China
  • Received:2007-12-19 Revised:2008-02-15 Online:2008-09-08 Published:2008-09-08

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摘要： This paper presents a computational fluid dynamics approach for micro droplet impacting on a flat dry surface. A two-phase flow approach is employed using FLUENT VOF multiphase model to calculate the flow distributions upon impact. The contact line velocity is tracked to calculate the dynamic contact angle through user defined function program. The study showed that the treatment of contact line velocity is crucial for the accurate prediction of droplet impacting on poor wettability surfaces. On the other hand, it has much less influence on the simulation of droplet impacting on good wettability surfaces. Good fit between simulation results and experimental data is obtained using this model.

关键词: droplet impact, wettability, contact line velocity, dynamic contact angle

Abstract: This paper presents a computational fluid dynamics approach for micro droplet impacting on a flat dry surface. A two-phase flow approach is employed using FLUENT VOF multiphase model to calculate the flow distributions upon impact. The contact line velocity is tracked to calculate the dynamic contact angle through user defined function program. The study showed that the treatment of contact line velocity is crucial for the accurate prediction of droplet impacting on poor wettability surfaces. On the other hand, it has much less influence on the simulation of droplet impacting on good wettability surfaces. Good fit between simulation results and experimental data is obtained using this model.

Key words: droplet impact, wettability, contact line velocity, dynamic contact angle

中图分类号:  (Interactions with surfaces)

  • 47.55.dr
47.11.-j (Computational methods in fluid dynamics) 47.61.Jd (Multiphase flows)