中国物理B ›› 2000, Vol. 9 ›› Issue (4): 279-283.doi: 10.1088/1009-1963/9/4/006

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THE EFFECT OF MESH ANODE ON CATHODIC ARC IN FOCUSING MAGNETIC FIELD

汤宝寅1, T. K. Kwok1, 曾照明1, Paul K. Chu1, 张涛2, 侯君达3, I. G. Brown4   

  1. (1)Department of Physics and Materials Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong; (2)Department of Physics and Materials Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong; Institute of low energy Nuclear Physics, Beijing Normal University 100875, China; (3)Institute of low energy Nuclear Physics, Beijing Normal University 100875, China; (4)Lawrence Berkeley National Laboratory, University of California, Berkeley, CA 94720
  • 收稿日期:1999-06-24 出版日期:2000-04-15 发布日期:2005-06-12
  • 基金资助:
    Project supported by Hong Kong RGC Earmarked (Grants 9040332 and 9040344), Beijing Science and Technology New Star Plan of contract No. 952870400

THE EFFECT OF MESH ANODE ON CATHODIC ARC IN FOCUSING MAGNETIC FIELD

Zhang Tao (张涛)ab, Hou Jun-da (侯君达)b, Tang Bao-yin (汤宝寅)a, T. K. Kwoka, Zeng Zhao-ming (曾照明)a, I. G. Brownc, Paul K. Chua   

  1. a Department of Physics and Materials Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong;  b Institute of low energy Nuclear Physics, Beijing Normal University 100875, China;  c Lawrence Berkeley National Laboratory, University of California, Berkeley, CA 94720
  • Received:1999-06-24 Online:2000-04-15 Published:2005-06-12
  • Supported by:
    Project supported by Hong Kong RGC Earmarked (Grants 9040332 and 9040344), Beijing Science and Technology New Star Plan of contract No. 952870400

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摘要： The performance and characteristics of a cathodic arc deposition apparatus consisting of a titanium cathode, an anode with and without a tungsten mesh, and a coil producing a focusing magnetic field between the anode and cathode are investigated. The arc voltage Va is measured with a fixed arc current. The relationship between Va and the magnetic field B with and without a mesh is obtained. In addition, the relationship between the arc current Ia and Vc, the voltage to which the artificial transmission line was charged, is measured with and without the mesh to determine the minimum ignition voltage for the arc. The arc resistance increases with the focusing magnetic strength B and decreases when using the mesh. Our results indicate that the high transparency and large area of the mesh allows a high plasma flux to penetrate the anode from the cathodic arc. The mesh also stabilizes the cathodic arc and gives better performance when used in concert with a focusing magnetic field.

Abstract: The performance and characteristics of a cathodic arc deposition apparatus consisting of a titanium cathode, an anode with and without a tungsten mesh, and a coil producing a focusing magnetic field between the anode and cathode are investigated. The arc voltage Va is measured with a fixed arc current. The relationship between Va and the magnetic field B with and without a mesh is obtained. In addition, the relationship between the arc current Ia and Vc, the voltage to which the artificial transmission line was charged, is measured with and without the mesh to determine the minimum ignition voltage for the arc. The arc resistance increases with the focusing magnetic strength B and decreases when using the mesh. Our results indicate that the high transparency and large area of the mesh allows a high plasma flux to penetrate the anode from the cathodic arc. The mesh also stabilizes the cathodic arc and gives better performance when used in concert with a focusing magnetic field.

中图分类号:  (Plasma-material interactions; boundary layer effects)

  • 52.40.Hf
52.50.Dg (Plasma sources) 52.70.Ds (Electric and magnetic measurements) 52.80.Mg (Arcs; sparks; lightning; atmospheric electricity)