中国物理B ›› 2006, Vol. 15 ›› Issue (6): 1351-1355.doi: 10.1088/1009-1963/15/6/037
松本光功1, 刘小晰1, 森迫昭光1, 付煜2, 杨正2
Fu Yu (付煜)a, Yang Zheng (杨正)a, Mitsunori Matsumoto (松本光功)b, Liu Xiao-Xi (刘小晰)b, Akimitsu Morisako (森迫昭光)b
摘要: The dependences of soft magnetic properties and microstructures of the sputtered FeCo (=Fe$_{65}$Co$_{35}$) films on Co underlayer thickness $t_{\rm Co}$, FeCo thickness $t_{\rm FeCo}$, substrate temperature $T_{\rm s}$ and target-substrate spacing $d_{\rm T-S}$ are studied. FeCo single layer generally shows a high coercivity with no obvious magnetic anisotropy. Excellent soft magnetic properties with saturation magnetization $\mu_{0}M_{\rm s}$ of 2.35 T and hard axis coercivity $H_{\rm ch}$ of 0.25 kA/m in FeCo films can be achieved by introducing a Co underlayer. It is shown that sandwiching a Co underlayer causes a change in orientation and reduction in grain size from 70 nm to about 10 nm in the FeCo layer. The magnetic softness can be explained by the Hoffmann's ripple theory due to the effect of grain size. The magnetic anisotropy can be controlled by changing $d_{\rm T-S}$, and a maximum of 14.3 kA/m for anisotropic field $H_{\rm k}$ is obtained with $d_{\rm T-S}$=18.0 cm.
中图分类号: (Magnetic properties of monolayers and thin films)