中国物理B ›› 2002, Vol. 11 ›› Issue (7): 725-729.doi: 10.1088/1009-1963/11/7/315

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Study of nanocrystalline Fe－Al－N soft magnetic thin films

谢天, 郑代顺, 李晓红, 马云贵, 魏福林, 杨正   

  1. Research Institute of Magnetic Materials, Lanzhou University, Lanzhou 730000, China
  • 收稿日期:2001-11-26 修回日期:2002-01-19 出版日期:2002-07-12 发布日期:2005-06-12
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No 10174028).

Study of nanocrystalline Fe－Al－N soft magnetic thin films

Xie Tian (谢天), Zheng Dai-Shun (郑代顺), Li Xiao-Hong (李晓红), Ma Yun-Gui (马云贵), Wei Fu-Lin (魏福林), Yang Zheng (杨正)   

  1. Research Institute of Magnetic Materials, Lanzhou University, Lanzhou 730000, China
  • Received:2001-11-26 Revised:2002-01-19 Online:2002-07-12 Published:2005-06-12
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No 10174028).

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摘要： Fe－Al－N films were fabricated by reactive sputtering using a radio-frequency magnetron sputtering system. The effects of Al and N content and annealing temperature on microstructure and magnetic properties were investigated. The Fe－Al－N films, which have good soft magnetic properties, consist of nanocrystalline α-Fe grains and a small amount of other phases in the boundaries of α-Fe grains. The average α-Fe grain size is about 10－15nm. A slight amount of Fe－N and Al－N compounds precipitate in the boundaries of α-Fe grains and suppress their growth. Annealing improves the soft magnetic properties slightly by releasing the residual stress and reducing defects.

Abstract: Fe－Al－N films were fabricated by reactive sputtering using a radio-frequency magnetron sputtering system. The effects of Al and N content and annealing temperature on microstructure and magnetic properties were investigated. The Fe－Al－N films, which have good soft magnetic properties, consist of nanocrystalline α-Fe grains and a small amount of other phases in the boundaries of $\alpha$-Fe grains. The average $\alpha$-Fe grain size is about 10－15nm. A slight amount of Fe－N and Al－N compounds precipitate in the boundaries of $\alpha$-Fe grains and suppress their growth. Annealing improves the soft magnetic properties slightly by releasing the residual stress and reducing defects.

Key words: soft magnetic properties, nanocrystalline, lattice deformation

中图分类号:  (Magnetic properties of monolayers and thin films)

  • 75.70.Ak
75.50.Tt (Fine-particle systems; nanocrystalline materials) 61.72.Mm (Grain and twin boundaries)