中国物理B ›› 2002, Vol. 11 ›› Issue (7): 725-729.doi: 10.1088/1009-1963/11/7/315
谢天, 郑代顺, 李晓红, 马云贵, 魏福林, 杨正
Xie Tian (谢天), Zheng Dai-Shun (郑代顺), Li Xiao-Hong (李晓红), Ma Yun-Gui (马云贵), Wei Fu-Lin (魏福林), Yang Zheng (杨正)
摘要: Fe-Al-N films were fabricated by reactive sputtering using a radio-frequency magnetron sputtering system. The effects of Al and N content and annealing temperature on microstructure and magnetic properties were investigated. The Fe-Al-N films, which have good soft magnetic properties, consist of nanocrystalline α-Fe grains and a small amount of other phases in the boundaries of α-Fe grains. The average α-Fe grain size is about 10-15nm. A slight amount of Fe-N and Al-N compounds precipitate in the boundaries of α-Fe grains and suppress their growth. Annealing improves the soft magnetic properties slightly by releasing the residual stress and reducing defects.
中图分类号: (Magnetic properties of monolayers and thin films)