Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing

doi:10.1088/1009-1963/15/10/035

中国物理B ›› 2006, Vol. 15 ›› Issue (10): 2397-2401.doi: 10.1088/1009-1963/15/10/035

Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing

刁宏伟¹, 郝会颖¹, 曾湘波¹, 廖显伯¹, 许　颖²

(1)State Laboratory for Surface Physics, Institute of Semiconductors and Center for Condensed Matter Physics,Chinese Academy of Science,Beijing 100083, China; (2)State Laboratory for Surface Physics, Institute of Semiconductors and Center for Condensed Matter Physics,Chinese Academy of Science,Beijing 100083, China;Beijing Solar Energy Research Institute, Beijing 100083, China

收稿日期:2006-03-10 修回日期:2006-06-07 出版日期:2006-10-20 发布日期:2006-10-20

Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing

Xu Ying(许颖)^a)b), Diao Hong-Wei(刁宏伟)^a), Hao Hui-Ying(郝会颖)^a), Zeng Xiang-Bo(曾湘波)^a), and Liao Xian-Bo(廖显伯)^a)

^a State Laboratory for Surface Physics, Institute of Semiconductors and Center for Condensed Matter Physics, Chinese Academy of Science, Beijing 100083, China; ^b Beijing Solar Energy Research Institute, Beijing 100083, China

Received:2006-03-10 Revised:2006-06-07 Online:2006-10-20 Published:2006-10-20

摘要/Abstract

摘要： In this paper, we use a pulsed rapid thermal processing (RTP) approach to create an emitter layer of hetero-junction solar cell. The process parameters and crystallization behaviour are studied. The structural, optical and electric properties of the crystallized films are also investigated. Both the depth of PN junction and the conductivity of the emitter layer increase with the number of RTP pulses increasing. Simulation results show that efficiencies of such solar cells can exceed 15% with a lower interface recombination rate, but the highest efficiency is 11.65% in our experiments.

关键词: emitter, rapid thermal processing (RTP), PECVD, solar cell

Abstract: In this paper, we use a pulsed rapid thermal processing (RTP) approach to create an emitter layer of hetero-junction solar cell. The process parameters and crystallization behaviour are studied. The structural, optical and electric properties of the crystallized films are also investigated. Both the depth of PN junction and the conductivity of the emitter layer increase with the number of RTP pulses increasing. Simulation results show that efficiencies of such solar cells can exceed 15% with a lower interface recombination rate, but the highest efficiency is 11.65% in our experiments.

Key words: emitter, rapid thermal processing (RTP), PECVD, solar cell

中图分类号: (Photoelectric conversion)

84.60.Jt

72.40.+w (Photoconduction and photovoltaic effects) 81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))

许　颖, 刁宏伟, 郝会颖, 曾湘波, 廖显伯. Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing[J]. 中国物理B, 2006, 15(10): 2397-2401.

Xu Ying(许颖), Diao Hong-Wei(刁宏伟), Hao Hui-Ying(郝会颖), Zeng Xiang-Bo(曾湘波), and Liao Xian-Bo(廖显伯). Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing[J]. Chinese Physics, 2006, 15(10): 2397-2401.

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Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing

Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing

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