中国物理B ›› 2002, Vol. 11 ›› Issue (3): 260-265.doi: 10.1088/1009-1963/11/3/312

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

Characterization of the high-voltage pulsed discharge plasma of ammonia by emission spectroscopy

杨炜东, 王培南, 刘征平, 糜岚, 李富铭   

  1. State Key Laboratory for Advanced Photonic Materials and Devices, Department of Optical Science and Engineering, School of Information, Fudan University, Shanghai 200433, China
  • 收稿日期:2001-05-05 修回日期:2001-08-07 出版日期:2005-06-13 发布日期:2005-06-13
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos 69978005, 29890216 and 10075012).

Characterization of the high-voltage pulsed discharge plasma of ammonia by emission spectroscopy

Yang Wei-Dong (杨炜东), Wang Pei-Nan (王培南), Liu Zheng-Ping (刘征平), Mi Lan (糜岚), Li Fu-Ming (李富铭)   

  1. State Key Laboratory for Advanced Photonic Materials and Devices, Department of Optical Science and Engineering, School of Information, Fudan University, Shanghai 200433, China
  • Received:2001-05-05 Revised:2001-08-07 Online:2005-06-13 Published:2005-06-13
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos 69978005, 29890216 and 10075012).

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摘要： We have used optical emission spectroscopy to characterize the high-voltage pulsed discharge of ammonia. Ammonia was highly dissociated in the discharge at low pressures. More atomic nitrogen was generated as compared to the discharge of nitrogen gas at the same pressure of 0.8kPa. We discuss the elimination of the oxygen impurity in the ammonia discharge, and we estimate the time-dependent atomic excitation temperature and the electron density from the measured spectra.

Abstract: We have used optical emission spectroscopy to characterize the high-voltage pulsed discharge of ammonia. Ammonia was highly dissociated in the discharge at low pressures. More atomic nitrogen was generated as compared to the discharge of nitrogen gas at the same pressure of 0.8kPa. We discuss the elimination of the oxygen impurity in the ammonia discharge, and we estimate the time-dependent atomic excitation temperature and the electron density from the measured spectra.

Key words: photoemission spectroscopy, plasma, electric discharge

中图分类号:  (Other gas discharges)

  • 52.80.Tn
82.33.Xj (Plasma reactions (including flowing afterglow and electric discharges)) 52.25.Os (Emission, absorption, and scattering of electromagnetic radiation ?) 52.25.Vy (Impurities in plasmas) 52.25.Kn (Thermodynamics of plasmas)