Compact NbN resonators with high kinetic inductance

doi:10.1088/1674-1056/abc2b8

中国物理B ›› 2020, Vol. 29 ›› Issue (12): 128401-.doi: 10.1088/1674-1056/abc2b8

收稿日期:2020-08-24 修回日期:2020-10-02 接受日期:2020-10-20 出版日期:2020-12-01 发布日期:2020-11-19

Compact NbN resonators with high kinetic inductance

Xing-Yu Wei(魏兴雨)^1,2, Jia-Zheng Pan(潘佳政)^1,2, Ya-Peng Lu(卢亚鹏)^1,2, Jun-Liang Jiang(江俊良)^1,2, Zi-Shuo Li(李子硕)^1,2, Sheng Lu(卢盛)^1,2, Xue-Cou Tu(涂学凑)^1,2, Qing-Yuan Zhao(赵清源)^1,2, Xiao-Qing Jia(贾小氢)^1,2, Lin Kang(康琳)^1,2, Jian Chen(陈健)^1,2, Chun-Hai Cao(曹春海)¹, Hua-Bing Wang(王华兵)^1,2, Wei-Wei Xu(许伟伟)¹, Guo-Zhu Sun(孙国柱)^1,2,†, and Pei-Heng Wu(吴培亨)^1,2

¹ Research Institute of Superconductor Electronics, School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China; ² Purple Mountain Laboratories, Nanjing 211111, China

Received:2020-08-24 Revised:2020-10-02 Accepted:2020-10-20 Online:2020-12-01 Published:2020-11-19
Contact: ^†Corresponding author. E-mail: gzsun@nju.edu.cn
Supported by:
Project partially supported by the National Key R&D Program of China (Grant No. 2016YFA0301801), the National Natural Science Foundation of China (Grant Nos. 11474154 and 61521001), PAPD, Dengfeng Project B of Nanjing University, and the Fundamental Research Funds for the Central Universities, China (Grant No. 14380134).

摘要/Abstract

Abstract: We design and fabricate Λ/2 coplanar waveguide NbN resonators, the thickness and length of which are only several nanometers and hundred microns, respectively. The quality factor of such compact resonators can reach up to 7.5×10⁴ at single photon power level at 30 mK with the resonance frequency around 6.835 GHz. In order to tune the resonant frequency, the resonator is terminated to the ground with a dc-SQUID. By tuning the magnetic flux in the dc-SQUID, the effective inductance of the dc-SQUID is varied, which leads to the change in the resonant frequency of the resonator. The tunability range is more than 30 MHz and the quality factor is about 3×10³. These compact and tunable NbN resonators have potential applications in the quantum information processing, such as in the precision measurement, coupling and/or reading out the quantum states of qubits.

Key words: superconducting resonator, NbN, kinetic inductance, tunable resonator

中图分类号: (Microwave circuits)

84.40.Dc

85.25.Dq (Superconducting quantum interference devices (SQUIDs))

. [J]. 中国物理B, 2020, 29(12): 128401-.

Xing-Yu Wei(魏兴雨), Jia-Zheng Pan(潘佳政), Ya-Peng Lu(卢亚鹏), Jun-Liang Jiang(江俊良), Zi-Shuo Li(李子硕), Sheng Lu(卢盛), Xue-Cou Tu(涂学凑), Qing-Yuan Zhao(赵清源), Xiao-Qing Jia(贾小氢), Lin Kang(康琳), Jian Chen(陈健), Chun-Hai Cao(曹春海), Hua-Bing Wang(王华兵), Wei-Wei Xu(许伟伟), Guo-Zhu Sun(孙国柱), and Pei-Heng Wu(吴培亨). Compact NbN resonators with high kinetic inductance[J]. Chin. Phys. B, 2020, 29(12): 128401-.

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Compact NbN resonators with high kinetic inductance

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