中国物理B ›› 2020, Vol. 29 ›› Issue (11): 116101-.doi: 10.1088/1674-1056/ab9c10

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Yan-Xia Wu(吴艳霞)1, Yun-Lin Liu(刘云琳)1, Ying Liu(刘颖)1, Bing Zhou(周兵)1, Hong-Jun Hei(黑鸿君)1, Yong Ma(马永)1, Sheng-Wang Yu(于盛旺)1,†(), Yu-Cheng Wu(吴玉程)1,2,‡()   

  • 收稿日期:2020-04-21 修回日期:2020-05-25 接受日期:2020-06-12 出版日期:2020-11-05 发布日期:2020-11-03

Structure and tribological properties of Si/a-C:H(Ag) multilayer film in stimulated body fluid

Yan-Xia Wu(吴艳霞)1, Yun-Lin Liu(刘云琳)1, Ying Liu(刘颖)1, Bing Zhou(周兵)1, Hong-Jun Hei(黑鸿君)1, Yong Ma(马永)1, Sheng-Wang Yu(于盛旺)1, †, and Yu-Cheng Wu(吴玉程)1, 2,, ‡   

  1. 1 Institute of New Carbon Materials, Taiyuan University of Technology, Taiyuan 030024, China
    2 Key Laboratory of Interface Science and Engineering in Advanced Materials (Taiyuan University of Technology), Ministry of Education, Taiyuan 030024, China
  • Received:2020-04-21 Revised:2020-05-25 Accepted:2020-06-12 Online:2020-11-05 Published:2020-11-03
  • Contact: †Corresponding author. E-mail: yushengwang@tyut.edu.cn ‡Corresponding author. E-mail: wyc@tyut.edu.cn
  • Supported by:
    the National Natural Science Foundation of China (Grant Nos. 51801133, 51505318, and 51671140), the Science and Technology Major Project of Shanxi Province, China (Grant No. 20181102013), the Shanxi Provincial Youth Fund, China (Grant No. 201801D221135), and the “1331 Project” Engineering Research Center of Shanxi Province, China (Grant No. PT201801).

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Abstract:

Si/a-C:H(Ag) multilayer films with different modulation periods are prepared to test their potential applications in human body. The composition, microstructure, mechanical and tribological properties in the simulated body fluid are investigated. The results show the concentration of Ag first decreases and then increases with the modulation period decreasing from 984 nm to 250 nm. Whereas the C content has an opposite variation trend. Notably, the concentration of Ag plays a more important role than the modulation period in the properties of the multilayer film. The a-C:H sublayer of the film with an appropriate Ag concentration (8.97 at.%) (modulation period of 512 nm) maintains the highest sp3/sp2 ratio, surface roughness and hardness, and excellent tribological property in the stimulated body fluid. An appropriate number of Ag atoms and size of Ag atom allow the Ag atoms to easily enter into the contact interface for load bearing and lubricating. This work proves that the Ag nanoparticles in the a-C:H sublayer plays a more important role in the tribological properties of the composite-multilayer film in stimulated body fluid condition.

Key words: Si/a-C:H(Ag) multilayer film, modulation periods, Ag concentration, tribological properties