Effect of substrate curvature on thickness distribution of polydimethylsiloxane thin film in spin coating process

doi:10.1088/1674-1056/27/6/068104

中国物理B ›› 2018, Vol. 27 ›› Issue (6): 68104-068104.doi: 10.1088/1674-1056/27/6/068104

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇下一篇

Effect of substrate curvature on thickness distribution of polydimethylsiloxane thin film in spin coating process

Ying Yan(闫英), Ping Zhou(周平), Shang-Xiong Zhang(张尚雄), Xiao-Guang Guo(郭晓光), Dong-Ming Guo(郭东明)

Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China

收稿日期:2018-02-23 修回日期:2018-04-03 出版日期:2018-06-05 发布日期:2018-06-05
通讯作者: Ying Yan E-mail:yanying@dlut.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos.51605079 and 51475076),the Science Fund for Creative Research Groups of the National Natural Science Foundation of China (Grant No.51621064),and the China Postdoctoral Science Foundation (Grant No.2016M591424).

Effect of substrate curvature on thickness distribution of polydimethylsiloxane thin film in spin coating process

Ying Yan(闫英), Ping Zhou(周平), Shang-Xiong Zhang(张尚雄), Xiao-Guang Guo(郭晓光), Dong-Ming Guo(郭东明)

Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China

Received:2018-02-23 Revised:2018-04-03 Online:2018-06-05 Published:2018-06-05
Contact: Ying Yan E-mail:yanying@dlut.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos.51605079 and 51475076),the Science Fund for Creative Research Groups of the National Natural Science Foundation of China (Grant No.51621064),and the China Postdoctoral Science Foundation (Grant No.2016M591424).

摘要/Abstract

摘要： The polymer spin coating is critical in flexible electronic manufaction and micro-electro-mechanical system (MEMS) devices due to its simple operation, and uniformly coated layers. Some researchers focus on the effects of spin coating parameters such as wafer rotating speed, the viscosity of the coating liquid and solvent evaporation on final film thickness. In this work, the influence of substrate curvature on film thickness distribution is considered. A new parameter which represents the edge bead effect ratio (r_e) is proposed to investigate the influence factor of edge bead effect. Several operation parameters including the curvature of the substrate and the wafer-spin speed are taken into account to study the effects on the film thickness uniformity and edge-bead ratio. The morphologies and film thickness values of the spin-coated PDMS films under various substrate curvatures and coating speeds are measured with laser confocal microscopy. According to the results, both the convex and concave substrate will help to reduce the edge-bead effect significantly and thin film with better surface morphology can be obtained at high spin speed. Additionally, the relationship between the edge-bead ratio and the thin film thickness is like parabolic curve instead of linear dependence. This work may contribute to the mass production of flexible electronic devices.

关键词: spin coating, non-planar substrate, film thickness distribution, edge-bead effect

Abstract: The polymer spin coating is critical in flexible electronic manufaction and micro-electro-mechanical system (MEMS) devices due to its simple operation, and uniformly coated layers. Some researchers focus on the effects of spin coating parameters such as wafer rotating speed, the viscosity of the coating liquid and solvent evaporation on final film thickness. In this work, the influence of substrate curvature on film thickness distribution is considered. A new parameter which represents the edge bead effect ratio (r_e) is proposed to investigate the influence factor of edge bead effect. Several operation parameters including the curvature of the substrate and the wafer-spin speed are taken into account to study the effects on the film thickness uniformity and edge-bead ratio. The morphologies and film thickness values of the spin-coated PDMS films under various substrate curvatures and coating speeds are measured with laser confocal microscopy. According to the results, both the convex and concave substrate will help to reduce the edge-bead effect significantly and thin film with better surface morphology can be obtained at high spin speed. Additionally, the relationship between the edge-bead ratio and the thin film thickness is like parabolic curve instead of linear dependence. This work may contribute to the mass production of flexible electronic devices.

Key words: spin coating, non-planar substrate, film thickness distribution, edge-bead effect

中图分类号: (Methods of deposition of films and coatings; film growth and epitaxy)

81.15.-z

68.15.+e (Liquid thin films) 47.85.mb (Coating flows ?) 68.55.-a (Thin film structure and morphology)

闫英, 周平, 张尚雄, 郭晓光, 郭东明. Effect of substrate curvature on thickness distribution of polydimethylsiloxane thin film in spin coating process[J]. 中国物理B, 2018, 27(6): 68104-068104.

Ying Yan(闫英), Ping Zhou(周平), Shang-Xiong Zhang(张尚雄), Xiao-Guang Guo(郭晓光), Dong-Ming Guo(郭东明). Effect of substrate curvature on thickness distribution of polydimethylsiloxane thin film in spin coating process[J]. Chin. Phys. B, 2018, 27(6): 68104-068104.

参考文献 30

[1]	Yu Z H, Tian J R and Song Y R 2014 Chin. Phys. B 23 094206
[2]	Liu G Q and Ying H P 2014 Chin. Phys. B 23 050502
[3]	Zhao S M and Zhuang P 2014 Chin. Phys. B 23 054203
[4]	Chen J X, Zhang H, Qiao L Y, Liang H and Sun W G 2018 Commun. Nonlinear Sci. Numer. Simulat. 54 202
[5]	Natsume Y and Sakata H 2000 Thin Solid Films 372 01
[6]	Eaton K and Sens 2002 Actuators B 85 42
[7]	Douglas P and Eaton K 2002 Sens. Actuators B 82 200
[8]	Mirkhalaf F and Schiffrin D J 2000 J. Electroanal. Chem. 484 182
[9]	Penza M and Anisimkin V I 1999 Sens. Actuators 76 162
[10]	Hall D B, Underhill P and Torkelson J M 1998 Polym. Eng. Sci. 38 2039
[11]	Omar O, Ray A K, Hassan A K, Davis F and Supramol 1997 Supramol. Sci. Science 4 417
[12]	Meyerhofer D 1978 J. Appl. Phys. A 49 3993
[13]	Bornside D E, Macosko C W and Scriven L E 1987 J. Imaging Tech. 13 122
[14]	Yonkoski R K and Soane D S 1992 J. Appl. Phys. 72 725
[15]	Norrman K, Ghanbari-Siahkali A, Larsen N B and Annu 2005 Rep. Prog. Chem. Sect. C:Phys. Chem. 101 174
[16]	Emslie A G, Bonner F T and Peck L G 1958 J. Appl. Phys. 29 858
[17]	Washo B D 1977 IBM Journal of Research and Development 21 190
[18]	Bornside D E, Macosko C W and Scriven L E 1989 J. Appl. Phys. 66 5185
[19]	Lawrence C J 1988 Phys. Fluids 31 2786
[20]	Mouhamad Y, Mokarian-Tabari P, Clarke N, Jones R A L and Geoghegan M 2014 J. Appl. Phys. 116 123513
[21]	Pavlidis M, Dimakopoulos Y and Tsamopoulos J 2010 J. Non-Newton. Fluid 165 576
[22]	Na J Y, Kang B, Sin D H, Cho K and Park Y D 2015 Sci. Rep. 5 13288
[23]	Shiratori S and Kubokawa T 2015 Phys. Fluids 27 102105
[24]	Uddin M A, Chan H P, Chow C K and Chan Y C 2004 J. Electron. Mater. 33 224
[25]	Schwartz L W and Roy R V 2004 Phys. Fluids 16 569
[26]	Lawrence C J and Zhou W 1991 J. Non-Newton. Fluid 39 137
[27]	Mokarian-Tabari P, Geoghegan M, Howse J R, Heriot S Y, Thompson R L and Jones R A L 2010 Eur. Phys. J. E 33 283
[28]	Chen L J, Luo J B, Liang Y Y, Zhang C H and Yang G G 2009 J. Optoelectron. Laser 20 470
[29]	Feng X G and Sun L C 2005 Opt. Tech. 31 489
[30]	Zhao J L, Wang H Q, Feng X G and Liang F C 2009 J. Appl. Opt. 30 101

Effect of substrate curvature on thickness distribution of polydimethylsiloxane thin film in spin coating process

Effect of substrate curvature on thickness distribution of polydimethylsiloxane thin film in spin coating process

RichHTML

PDF (PC)

赞

可视化

摘要/Abstract

引用本文

使用本文

参考文献 30

相关文章 1

Metrics

本文评价

推荐阅读 0