Effect of substrate curvature on thickness distribution of polydimethylsiloxane thin film in spin coating process

闫英, 周平, 张尚雄, 郭晓光, 郭东明

Ying Yan(闫英), Ping Zhou(周平), Shang-Xiong Zhang(张尚雄), Xiao-Guang Guo(郭晓光), Dong-Ming Guo(郭东明)

中国物理B . 2018, (6): 68104 -068104 . DOI: 10.1088/1674-1056/27/6/068104