Mode transition in dusty micro-plasma driven by pulsed radio-frequency source in C2H2/Ar mixture

doi:10.1088/1674-1056/26/4/045202

中国物理B ›› 2017, Vol. 26 ›› Issue (4): 45202-045202.doi: 10.1088/1674-1056/26/4/045202

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇下一篇

Mode transition in dusty micro-plasma driven by pulsed radio-frequency source in C₂H₂/Ar mixture

Xiang-Mei Liu(刘相梅), Rui Li(李瑞), Ya-Hui Zheng(郑亚辉)

School of Science, Qiqihar University, Qiqihar 161006, China

收稿日期:2016-10-22 修回日期:2016-12-22 出版日期:2017-04-05 发布日期:2017-04-05
通讯作者: Xiang-Mei Liu E-mail:lxmjsc98@163.com
基金资助:
Project supported by the Natural Science Foundation of Heilongjiang Province, China (Grant Nos. A2015011 and A2015010), the Postdoctoral Scientific Research Developmental Fund of Heilongjiang Province, China (Grant No. LBH-Q14159), the National Natural Science Foundation of China (Grant Nos. 11404180 and 11405092), and the Program for Young Teachers Scientific Research in Qiqihar University, Heilongjiang Province, China (Grant No. 2014k-Z11).

Mode transition in dusty micro-plasma driven by pulsed radio-frequency source in C₂H₂/Ar mixture

Xiang-Mei Liu(刘相梅), Rui Li(李瑞), Ya-Hui Zheng(郑亚辉)

School of Science, Qiqihar University, Qiqihar 161006, China

Received:2016-10-22 Revised:2016-12-22 Online:2017-04-05 Published:2017-04-05
Contact: Xiang-Mei Liu E-mail:lxmjsc98@163.com
Supported by:
Project supported by the Natural Science Foundation of Heilongjiang Province, China (Grant Nos. A2015011 and A2015010), the Postdoctoral Scientific Research Developmental Fund of Heilongjiang Province, China (Grant No. LBH-Q14159), the National Natural Science Foundation of China (Grant Nos. 11404180 and 11405092), and the Program for Young Teachers Scientific Research in Qiqihar University, Heilongjiang Province, China (Grant No. 2014k-Z11).

摘要/Abstract

摘要： Physical qualities of dusty plasma in the pulsed radio-frequency C₂H₂/Ar microdischarges are carefully investigated by a one-dimensional hydrodynamic model and aerosol dynamics model. Since the thermophoretic force has a great effect on the nanoparticle density spatial distribution, the neutral gas energy equation is taken into accounted. The effects of pulse parameters (dust ratio, modulation frequency) on the nanoparticle formation and growth process are mainly discussed. The calculation results show that, as the duty ratio increases, the mode transition from the sheath oscillation (α regime) to the secondary electron heating (γ regime) occurred, which is quite different from the conventional pulsed discharge. Moreover, the effect of modulation frequency on the width of sheath and plasma density is analyzed. Compared with the H₂CC^- ions, the modulation frequency effect on the nanoparticles density becomes more prominent.

关键词: pulsed process parameters, C₂H₂/Ar microdischarges, dusty plasma

Abstract: Physical qualities of dusty plasma in the pulsed radio-frequency C₂H₂/Ar microdischarges are carefully investigated by a one-dimensional hydrodynamic model and aerosol dynamics model. Since the thermophoretic force has a great effect on the nanoparticle density spatial distribution, the neutral gas energy equation is taken into accounted. The effects of pulse parameters (dust ratio, modulation frequency) on the nanoparticle formation and growth process are mainly discussed. The calculation results show that, as the duty ratio increases, the mode transition from the sheath oscillation (α regime) to the secondary electron heating (γ regime) occurred, which is quite different from the conventional pulsed discharge. Moreover, the effect of modulation frequency on the width of sheath and plasma density is analyzed. Compared with the H₂CC^- ions, the modulation frequency effect on the nanoparticles density becomes more prominent.

Key words: pulsed process parameters, C₂H₂/Ar microdischarges, dusty plasma

中图分类号: (Dusty or complex plasmas; plasma crystals)

52.27.Lw

52.65.-y (Plasma simulation)

刘相梅, 李瑞, 郑亚辉. Mode transition in dusty micro-plasma driven by pulsed radio-frequency source in C₂H₂/Ar mixture[J]. 中国物理B, 2017, 26(4): 45202-045202.

Xiang-Mei Liu(刘相梅), Rui Li(李瑞), Ya-Hui Zheng(郑亚辉). Mode transition in dusty micro-plasma driven by pulsed radio-frequency source in C₂H₂/Ar mixture[J]. Chin. Phys. B, 2017, 26(4): 45202-045202.

参考文献 24

[1]	Daniels B K, Brown D W and Kimock F M 1997 J. Mater. Res. 12 2485
[2]	Robertson J 2002 Mater. Sci. Eng. R. 37 129
[3]	Xu N S and Huq S E 2005 Mater. Sci. Eng. R: Rep. 48 47
[4]	De Bleecker K, Bogaerts A, Gijbels R and Goedheer W 2004 Phys. Rev. E 69 056409
[5]	Ostrikov K 2005 Rev. Mod. Phys. 77 489
[6]	Deschenaux Ch, Affolter A, Magni D, Hollenstein Ch and Fayet P 1999 J. Phys. D: Appl. Phys. 32 1876
[7]	De Bleecker K, Bogaerts A and Goedheer W 2006 Phys. Rev. E 73 026405
[8]	De Bleecker K, Bogaerts A and Goedheer W 2006 Appl. Phys. Lett. 88 151501
[9]	Mao M, Benedikt J, Consoli A and Bogaerts A 2008 J. Phys. D: Appl. Phys. 41 225201
[10]	Benedikt J, Consoli A, Schulze M and von Keudell A 2007 J. Phys. Chem. A 111 10453
[11]	Moravej M 2006 Plasma Sourcs Sci. Technol. 15 204
[12]	Kogelschatz U 2007 Contrib. Plasma Phys. 47 80
[13]	Munoz-Serrano E, Hagelaar G, Callegari Th, Boeuf J and Pitchford L C 2006 Plasma Phys. Control. Fusion 48 B391
[14]	Lieberman M A and Lichtenberg A J 2005 Principles of Plasma Discharges and Materials Processing, 2nd edn. (New York: Wiley-Interscience)
[15]	Pai D, Stancu G, Lacoste D and Laux C 2009 Plasma Sources Sci. Technol. 18 045030
[16]	Ito T, Kobayashi K, Czarnetzki U and Hamaguchi S 2010 J. Phys. D: Appl. Phys. 43 062001
[17]	Lu X and Laroussi M 2006 J. Phys. D: Appl. Phys. 39 1127
[18]	Laroussi M, Lu X, Kolobov V and Arslanbekov R 2004 J. Appl. Phys. 96 3028
[19]	Pai D, Lacoste D and Laux C 2010 J. Appl. Phys. 107 093303
[20]	Liu X M, Li Q N and Xu X 2014 Chin. Phys. B 23 085202
[21]	Liu X M, Li Q N and Li R 2015 Chin. Phys. B 24 075204
[22]	Iza F, Lee J K and Kong M G 2012 Phys. Rev. Lett. 99 075004
[23]	Boeuf J P and Pitchford L C 1995 Phys. Rev. E 51 1376
[24]	Wetering F, Beckers J and Kroesen G 2012 J. Phys. D: Appl. Phys. 45 485205

Mode transition in dusty micro-plasma driven by pulsed radio-frequency source in C₂H₂/Ar mixture

Mode transition in dusty micro-plasma driven by pulsed radio-frequency source in C₂H₂/Ar mixture

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