中国物理B ›› 2016, Vol. 25 ›› Issue (11): 114213-114213.doi: 10.1088/1674-1056/25/11/114213

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇    下一篇

High-reflectivity high-contrast grating focusing reflector on silicon-on-insulator wafer

Wenjing Fang(房文敬), Yongqing Huang(黄永清), Xiaofeng Duan(段晓峰), Kai Liu(刘凯), Jiarui Fei(费嘉瑞), Xiaomin Ren(任晓敏)   

  1. 1 Institute of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China;
    2 State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
  • 收稿日期:2016-04-07 修回日期:2016-07-20 出版日期:2016-11-05 发布日期:2016-11-05
  • 通讯作者: Yongqing Huang E-mail:yqhuang@bupt.edu.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 61274044, 61574019 and 61020106007), the National Basic Research Program of China (Grant No. 2010CB327600), the Specialized Research Fund for the Doctoral Program of Higher Education of China (Grant No. 20130005130001), the Natural Science Foundation of Beijing, China (Grant No. 4132069), the Key International Science and Technology Cooperation Project of China (Grant No. 2011RR000100), the 111 Project of China (Grant No. B07005), and the Program for Changjiang Scholars and Innovative Research Team in Universities of China (Grant No. IRT0609).

High-reflectivity high-contrast grating focusing reflector on silicon-on-insulator wafer

Wenjing Fang(房文敬)1,2, Yongqing Huang(黄永清)1,2, Xiaofeng Duan(段晓峰)1,2, Kai Liu(刘凯)1,2, Jiarui Fei(费嘉瑞)1,2, Xiaomin Ren(任晓敏)1,2   

  1. 1 Institute of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China;
    2 State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
  • Received:2016-04-07 Revised:2016-07-20 Online:2016-11-05 Published:2016-11-05
  • Contact: Yongqing Huang E-mail:yqhuang@bupt.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 61274044, 61574019 and 61020106007), the National Basic Research Program of China (Grant No. 2010CB327600), the Specialized Research Fund for the Doctoral Program of Higher Education of China (Grant No. 20130005130001), the Natural Science Foundation of Beijing, China (Grant No. 4132069), the Key International Science and Technology Cooperation Project of China (Grant No. 2011RR000100), the 111 Project of China (Grant No. B07005), and the Program for Changjiang Scholars and Innovative Research Team in Universities of China (Grant No. IRT0609).

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摘要： A high-contrast grating (HCG) focusing reflector providing phase front control of reflected light and high reflectivity is proposed and fabricated. Basic design rules to engineer this category of structures are given in detail. A 1550 nm TM polarized incident light of 11.86 mm in focal length and 0.8320 in reflectivity is obtained in experiment. The wavelength dependence of the fabricated HCGs from 1530 nm to 1580 nm is also tested. The test results show that the focal length is in the range of 11.81-12 mm, which is close to the designed focal length of 15 mm. The reflectivity is almost above 0.56 within a bandwidth of 50 nm. At a distance of 11.86 mm, the light is focused to a round spot with the highest concentration, which is much smaller than the size of the incident beam. The FWHM of the reflected light beam decreases to 120 nm, and the intensity increases to 1.18.

关键词: gratings, reflectors, polarization

Abstract: A high-contrast grating (HCG) focusing reflector providing phase front control of reflected light and high reflectivity is proposed and fabricated. Basic design rules to engineer this category of structures are given in detail. A 1550 nm TM polarized incident light of 11.86 mm in focal length and 0.8320 in reflectivity is obtained in experiment. The wavelength dependence of the fabricated HCGs from 1530 nm to 1580 nm is also tested. The test results show that the focal length is in the range of 11.81-12 mm, which is close to the designed focal length of 15 mm. The reflectivity is almost above 0.56 within a bandwidth of 50 nm. At a distance of 11.86 mm, the light is focused to a round spot with the highest concentration, which is much smaller than the size of the incident beam. The FWHM of the reflected light beam decreases to 120 nm, and the intensity increases to 1.18.

Key words: gratings, reflectors, polarization

中图分类号:  (Gratings)

  • 42.79.Dj
42.79.Fm (Reflectors, beam splitters, and deflectors) 42.68.Mj (Scattering, polarization)