High-reflectivity high-contrast grating focusing reflector on silicon-on-insulator wafer
房文敬, 黄永清, 段晓峰, 刘凯, 费嘉瑞, 任晓敏
High-reflectivity high-contrast grating focusing reflector on silicon-on-insulator wafer
Wenjing Fang(房文敬), Yongqing Huang(黄永清), Xiaofeng Duan(段晓峰), Kai Liu(刘凯), Jiarui Fei(费嘉瑞), Xiaomin Ren(任晓敏)
中国物理B
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2016, (11): 114213
-114213
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DOI: 10.1088/1674-1056/25/11/114213