Balmer-alpha and Balmer-beta Stark line intensity profiles for high-power hydrogen inductively coupled plasmas

doi:10.1088/1674-1056/23/7/075201

›› 2014, Vol. 23 ›› Issue (7): 75201-075201.doi: 10.1088/1674-1056/23/7/075201

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇下一篇

Balmer-alpha and Balmer-beta Stark line intensity profiles for high-power hydrogen inductively coupled plasmas

王松柏^{a b}, 雷光玖^c, 刘东平^a, 杨思泽^a

a School of Physics and Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China;
b College of Physics and Information Engineering, Fuzhou University, Fuzhou 350108, China;
c Southwestern Institute of Physics, Chengdu 610041, China

收稿日期:2013-10-12 修回日期:2014-03-17 出版日期:2014-07-15 发布日期:2014-07-15
基金资助:
Project supported by the National Magnetic Confinement Fusion Science Program of China (Grant Nos. 2011GB108011 and 2010GB103001) and the Major International (Regional) Project Cooperation and Exchanges (Grant No. 11320101005).

Balmer-alpha and Balmer-beta Stark line intensity profiles for high-power hydrogen inductively coupled plasmas

Wang Song-Bai (王松柏)^{a b}, Lei Guang-Jiu (雷光玖)^c, Liu Dong-Ping (刘东平)^a, Yang Si-Ze (杨思泽)^a

a School of Physics and Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China;
b College of Physics and Information Engineering, Fuzhou University, Fuzhou 350108, China;
c Southwestern Institute of Physics, Chengdu 610041, China

Received:2013-10-12 Revised:2014-03-17 Online:2014-07-15 Published:2014-07-15
Contact: Lei Guang-Jiu, Liu Dong-Ping E-mail:gjlei@swip.ac.cn;dongping.liu@dlnu.edu.cn
About author:52.27.Gr; 52.27.-h
Supported by:
Project supported by the National Magnetic Confinement Fusion Science Program of China (Grant Nos. 2011GB108011 and 2010GB103001) and the Major International (Regional) Project Cooperation and Exchanges (Grant No. 11320101005).

摘要/Abstract

摘要： We compare Balmer-alpha (H_α) and Balmer-beta (H_β) emissions from high-power (1.0-6.0 kW) hydrogen inductively coupled plasmas (ICPs), and propose region I (0.0-2.0 kW), region Ⅱ (2.0-5.0 kW), and region Ⅲ (5.0-6.0 kW). In region I, both H_α emission intensity (I_α) and H_β emission intensity (I_β) increase with radio frequency (RF) power, which is explained by the corona model and Boltzmann's law, etc. However, in region Ⅱ, I_α almost remains constant while I_β rapidly achieves its maximum value. In region Ⅲ, I_α slightly increases with RF power, while I_β decreases with RF power, which deviates significantly from the theoretical explanation for the H_α and H_β emissions in region I. It is suggested that two strong electric fields are generated in high-power (2.0-6.0 kW) hydrogen ICPs: one is due to the external electric field of high-power RF discharge, and the other one is due to the micro electric field of the ions and electrons around the exited state hydrogen atoms in ICPs. Therefore, the strong Stark effect can play an important role in explaining the experimental results.

关键词: high-power radio frequency plasma, H_α and H_β spectral lines in hydrogen ICPs, Stark effect

Abstract: We compare Balmer-alpha (H_α) and Balmer-beta (H_β) emissions from high-power (1.0-6.0 kW) hydrogen inductively coupled plasmas (ICPs), and propose region I (0.0-2.0 kW), region Ⅱ (2.0-5.0 kW), and region Ⅲ (5.0-6.0 kW). In region I, both H_α emission intensity (I_α) and H_β emission intensity (I_β) increase with radio frequency (RF) power, which is explained by the corona model and Boltzmann's law, etc. However, in region Ⅱ, I_α almost remains constant while I_β rapidly achieves its maximum value. In region Ⅲ, I_α slightly increases with RF power, while I_β decreases with RF power, which deviates significantly from the theoretical explanation for the H_α and H_β emissions in region I. It is suggested that two strong electric fields are generated in high-power (2.0-6.0 kW) hydrogen ICPs: one is due to the external electric field of high-power RF discharge, and the other one is due to the micro electric field of the ions and electrons around the exited state hydrogen atoms in ICPs. Therefore, the strong Stark effect can play an important role in explaining the experimental results.

Key words: high-power radio frequency plasma, H_α and H_β spectral lines in hydrogen ICPs, Stark effect

中图分类号: (Strongly-coupled plasmas)

52.27.Gr

52.27.-h (Basic studies of specific kinds of plasmas)

王松柏, 雷光玖, 刘东平, 杨思泽. Balmer-alpha and Balmer-beta Stark line intensity profiles for high-power hydrogen inductively coupled plasmas[J]. , 2014, 23(7): 75201-075201.

Wang Song-Bai (王松柏), Lei Guang-Jiu (雷光玖), Liu Dong-Ping (刘东平), Yang Si-Ze (杨思泽). Balmer-alpha and Balmer-beta Stark line intensity profiles for high-power hydrogen inductively coupled plasmas[J]. Chin. Phys. B, 2014, 23(7): 75201-075201.

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Balmer-alpha and Balmer-beta Stark line intensity profiles for high-power hydrogen inductively coupled plasmas

Balmer-alpha and Balmer-beta Stark line intensity profiles for high-power hydrogen inductively coupled plasmas

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