中国物理B ›› 2012, Vol. 21 ›› Issue (3): 37502-037502.doi: 10.1088/1674-1056/21/3/037502

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张璐然,吕华,刘曦,白建民,魏福林   

  • 收稿日期:2011-06-14 修回日期:2011-10-13 出版日期:2012-02-15 发布日期:2012-02-15
  • 通讯作者: 魏福林,weifl@lzu.edu.cn E-mail:weifl@lzu.edu.cn

Excellent soft magnetic properties realized in FeCoN thin films

Zhang Lu-Ran(张璐然), Lü Hua(吕华), Liu Xi(刘曦), Bai Jian-Min(白建民), and Wei Fu-Lin(魏福林)†   

  1. Key Laboratory of Education Ministry on Magnetism and Magnetic Material, Research Institute of Magnetic Materials, Lanzhou University, Lanzhou 730000, China
  • Received:2011-06-14 Revised:2011-10-13 Online:2012-02-15 Published:2012-02-15
  • Contact: Wei Fu-Lin,weifl@lzu.edu.cn E-mail:weifl@lzu.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 10874060 and 60803035).

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Abstract: FeCoN soft magnetic thin films are prepared by using the reactive direct-current magnetron sputtering technique. It is found that the addition of N2 can reduce the coercivity of the FeCoN film, and excellent soft magnetic properties can be obtained when the ratio of N2 flow to total gas flow is 10%. The influences of texture, grain size, and stress on the magnetic properties and the high-frequency behaviors of the films are also discussed.

Key words: nanocrystalline soft magnetic material, magnetic thin films, iron alloys

中图分类号:  (Saturation moments and magnetic susceptibilities)

  • 75.30.Cr
75.30.Gw (Magnetic anisotropy) 75.47.Np (Metals and alloys)