中国物理B ›› 2011, Vol. 20 ›› Issue (9): 94212-094212.doi: 10.1088/1674-1056/20/9/094212

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Rugate filters prepared by rapidly alternating deposition

张俊超, 方明, 邵宇川, 晋云霞, 贺洪波   

  1. Key Laboratory of Material Science and Technology for High Power Lasers, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 收稿日期:2011-03-21 修回日期:2011-04-22 出版日期:2011-09-15 发布日期:2011-09-15
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 10704079 and 10976030).

Rugate filters prepared by rapidly alternating deposition

Zhang Jun-Chao(张俊超)a)b), Fang Ming(方明)a), Shao Yu-Chuan(邵宇川)a)b), Jin Yun-Xia(晋云霞)a), and He Hong-Bo(贺洪波) a)†   

  1. a Key Laboratory of Material Science and Technology for High Power Lasers, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; b Graduate University of Chinese Academy of Sciences, Beijing 100049, China
  • Received:2011-03-21 Revised:2011-04-22 Online:2011-09-15 Published:2011-09-15
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 10704079 and 10976030).

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摘要： A methodology for the fabrication of composite (Nb2O5)1-x(SiO2)x thin-film rugate filters by using pulsed direct current magnetron sputtering is presented. The two materials are mixed using rapidly alternating deposition technology. The optical properties of the composite films varying with the composition of the material are studied in detail. Refractive indices between 1.50 and 2.14 can be realized in our coating system. Two designed rugate filters with a reflection band at the wavelength of 532 nm are fabricated using an automatic deposition process. The microstructure of the rugate filter is investigated by using scanning electron microscopy. The calculated and the measured transmittance spectra are in good agreement with each other. The causes of the slight differences between them are also analysed.

关键词: rapidly alternating deposition, rugate filter, magnetron sputtering, mixed oxides

Abstract: A methodology for the fabrication of composite (Nb2O5)1-x(SiO2)x thin-film rugate filters by using pulsed direct current magnetron sputtering is presented. The two materials are mixed using rapidly alternating deposition technology. The optical properties of the composite films varying with the composition of the material are studied in detail. Refractive indices between 1.50 and 2.14 can be realized in our coating system. Two designed rugate filters with a reflection band at the wavelength of 532 nm are fabricated using an automatic deposition process. The microstructure of the rugate filter is investigated by using scanning electron microscopy. The calculated and the measured transmittance spectra are in good agreement with each other. The causes of the slight differences between them are also analysed.

Key words: rapidly alternating deposition, rugate filter, magnetron sputtering, mixed oxides

中图分类号:  (Gradient-index (GRIN) devices)

  • 42.79.Ry
81.15.Cd (Deposition by sputtering)