中国物理B ›› 2007, Vol. 16 ›› Issue (9): 2757-2763.doi: 10.1088/1009-1963/16/9/043

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

A comparison among optical emission spectroscopic methods of determining electron temperature in low pressure argon plasmas

牛田野, 曹金祥, 刘磊, 刘金英, 王艳, 王亮, 吕铀   

  1. Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China； Chinese Academy of Science Key Laboratory of Basic Plasma Physics, Hefei 230026, China
  • 收稿日期:2006-09-28 修回日期:2007-03-12 出版日期:2007-09-20 发布日期:2007-09-20

A comparison among optical emission spectroscopic methods of determining electron temperature in low pressure argon plasmas

Niu Tian-Ye(牛田野), Cao Jin-Xiang(曹金祥)†, Liu Lei(刘磊), Liu Jin-Ying(刘金英), Wang Yan(王艳), Wang Liang(王亮), and Lv You(吕铀)   

  1. Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China； Chinese Academy of Science Key Laboratory of Basic Plasma Physics, Hefei 230026, China
  • Received:2006-09-28 Revised:2007-03-12 Online:2007-09-20 Published:2007-09-20

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摘要： In this article, four kinds of optical emission spectroscopic methods of determining electron temperature are used to investigate the relationship between electron temperature and pressure in the cylindrical plasmas of dc glow discharges at low pressures in laboratory by measuring the relative intensities of ArI lines at various pressures. These methods are developed respectively on the basis of the Fermi--Dirac model, corona model, and two kinds of electron collision cross section models according to the kinetic analysis. Their theoretical bases and the conditions to which they are applicable are reviewed, and their calculation results and fitting errors are compared with each other. The investigation has indicated that the electron temperatures obtained by the four methods become consistent with each other when the pressure increases in the low pressure argon plasmas.

Abstract: In this article, four kinds of optical emission spectroscopic methods of determining electron temperature are used to investigate the relationship between electron temperature and pressure in the cylindrical plasmas of dc glow discharges at low pressures in laboratory by measuring the relative intensities of ArI lines at various pressures. These methods are developed respectively on the basis of the Fermi--Dirac model, corona model, and two kinds of electron collision cross section models according to the kinetic analysis. Their theoretical bases and the conditions to which they are applicable are reviewed, and their calculation results and fitting errors are compared with each other. The investigation has indicated that the electron temperatures obtained by the four methods become consistent with each other when the pressure increases in the low pressure argon plasmas.

Key words: plasma diagnostics, gas discharge, optic emission spectroscopy, electron temperature

中图分类号:  (Optical (ultraviolet, visible, infrared) measurements)

  • 52.70.Kz
52.25.-b (Plasma properties) 52.80.Hc (Glow; corona)