中国物理B ›› 2006, Vol. 15 ›› Issue (11): 2697-2705.doi: 10.1088/1009-1963/15/11/039

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Preparation and tribological properties of DLC/Ti filmby pulsed laser arc deposition

张振宇, 路新春, 雒建斌, 劭天敏, 卿涛, 张晨辉   

  1. State Key Laboratory of Tribology, Tsinghua University, Beijing100084, China
  • 收稿日期:2006-01-05 修回日期:2006-05-11 出版日期:2006-11-20 发布日期:2006-11-20
  • 基金资助:
    roject supported by the National Key Basic Research Program of China (Grant No 2003CB716201) and the National Natural Science Foundation of China (Grant No~50575121) and Electro--Mechanic Technology Advancing Foundation of NSK Ltd of Japan.

Preparation and tribological properties of DLC/Ti filmby pulsed laser arc deposition

Zhang Zhen-Yu(张振宇)† , Lu Xin-Chun(路新春), Luo Jian-Bin(雒建斌), Shao Tian-Min(劭天敏), Qing Tao(卿涛), and Zhang Chen-Hui(张晨辉)   

  1. State Key Laboratory of Tribology, Tsinghua University, Beijing100084, China
  • Received:2006-01-05 Revised:2006-05-11 Online:2006-11-20 Published:2006-11-20
  • Supported by:
    roject supported by the National Key Basic Research Program of China (Grant No 2003CB716201) and the National Natural Science Foundation of China (Grant No~50575121) and Electro--Mechanic Technology Advancing Foundation of NSK Ltd of Japan.

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摘要： This paper reports that DLC (diamond like carbon)/Ti and DLC films were prepared by using pulsed laser arc deposition. R-ray diffraction, Auger electron spectroscopy, Raman spectroscopy, atomic force microscopy, nanoindenter, spectroscopic ellipsometer, surface profiler and micro-tribometer were employed to study the structure and tribological properties of DLC/Ti and DLC films. The results show that DLC/Ti film, with $I(D)/I(G)$ 0.28 and corresponding to 76{\%} sp$^{3}$ content calculated by Raman spectroscopy, uniform chemical composition along depth direction, 98 at{\%} content of carbon, hardness 8.2 GPa and Young's modulus 110.5 GPa, compressive stress 6.579 GPa, thickness 46~nm, coefficient of friction 0.08, and critical load 95mN, exhibits excellent mechanical and tribological properties.

关键词: diamond like carbon, tribological property, pulsed laser arc deposition, Raman\\ \hspace*{1.9cm} spectroscopy

Abstract: This paper reports that DLC (diamond like carbon)/Ti and DLC films were prepared by using pulsed laser arc deposition. R-ray diffraction, Auger electron spectroscopy, Raman spectroscopy, atomic force microscopy, nanoindenter, spectroscopic ellipsometer, surface profiler and micro-tribometer were employed to study the structure and tribological properties of DLC/Ti and DLC films. The results show that DLC/Ti film, with $I(D)/I(G)$ 0.28 and corresponding to 76%sp$^{3}$ content calculated by Raman spectroscopy, uniform chemical composition along depth direction, 98 at%content of carbon, hardness 8.2 GPa and Young's modulus 110.5 GPa, compressive stress 6.579 GPa, thickness 46~nm, coefficient of friction 0.08, and critical load 95mN, exhibits excellent mechanical and tribological properties.

Key words: diamond like carbon, tribological property, pulsed laser arc deposition, Raman spectroscopy

中图分类号:  (Thin film structure and morphology)

  • 68.55.-a
62.20.Qp (Friction, tribology, and hardness) 68.37.Ps (Atomic force microscopy (AFM)) 68.49.Jk (Electron scattering from surfaces) 68.60.Bs (Mechanical and acoustical properties) 78.30.-j (Infrared and Raman spectra)