中国物理B ›› 2005, Vol. 14 ›› Issue (11): 2256-2261.doi: 10.1088/1009-1963/14/11/020

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

Calculation of ion energy distributions of argon excimer ions generated in helicon plasma

房同珍, 江南, 王龙   

  1. Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China
  • 收稿日期:2005-11-11 修回日期:2005-07-18 出版日期:2005-11-20 发布日期:2005-11-20

Calculation of ion energy distributions of argon excimer ions generated in helicon plasma

Fang Tong-Zhen (房同珍), Jiang Nan (江南), Wang Long (王龙)   

  1. Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China
  • Received:2005-11-11 Revised:2005-07-18 Online:2005-11-20 Published:2005-11-20

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摘要： A program is developed to calculate the ion energy distributions (IEDs) of Ar2+ making use of a simplified kinetic model with a combination of Monte Carlo method. Several coefficients are used to realize good match between the calculated and measured results. Some important assumptions are confirmed: argon excimer ions have short lifetime, hence they are formed in a short range before the collecting electrode. The excimer ions that encounter collisions will be discarded because they turn to other ion species after they collide with argon atoms. From the calculated results some plasma parameters such as the cross section or neutral density in discharge could be evaluated.

Abstract: A program is developed to calculate the ion energy distributions (IEDs) of Ar2+ making use of a simplified kinetic model with a combination of Monte Carlo method. Several coefficients are used to realize good match between the calculated and measured results. Some important assumptions are confirmed: argon excimer ions have short lifetime, hence they are formed in a short range before the collecting electrode. The excimer ions that encounter collisions will be discarded because they turn to other ion species after they collide with argon atoms. From the calculated results some plasma parameters such as the cross section or neutral density in discharge could be evaluated.

Key words: IED, helicon, plasma sheath

中图分类号:  (Plasma sheaths)

  • 52.40.Kh
52.25.Dg (Plasma kinetic equations) 52.50.Qt (Plasma heating by radio-frequency fields; ICR, ICP, helicons)