Calculation of ion energy distributions of argon excimer ions generated in helicon plasma

房同珍, 江南, 王龙

Fang Tong-Zhen (房同珍), Jiang Nan (江南), Wang Long (王龙)

中国物理B . 2005, (11): 2256 -2261 . DOI: 10.1088/1009-1963/14/11/020