中国物理B ›› 1993, Vol. 2 ›› Issue (9): 702-710.doi: 10.1088/1004-423X/2/9/009

• • 上一篇    

INVESTIGATION OF ION SPUTTERING FOR EUTECTIC Cu-37 at% Ag ALLOY

赵烈1, 张慧明1, 王震遐2, 潘冀生2, 章骥平2, 陶振兰2, 朱福英2   

  1. (1)Center Laboratory, Hangzhou University, Hangzhou 310028, China; (2)Institute of Nuclear Research, Academia Sinica, Shanghai 201800, China
  • 收稿日期:1992-07-16 出版日期:1993-09-20 发布日期:1993-09-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China.

INVESTIGATION OF ION SPUTTERING FOR EUTECTIC Cu-37 at% Ag ALLOY

WANG ZHEN-XIA (王震遐)a, PAN JI-SHENG (潘冀生)a, ZHANG JI-PING (章骥平)a, TAO ZHEN-LAN (陶振兰)a, ZHU FU-YING (朱福英)a, ZHAO LIE (赵烈)b, ZHANG HUI-MING (张慧明)b   

  1. a Institute of Nuclear Research, Academia Sinica, Shanghai 201800, China; b Center Laboratory, Hangzhou University, Hangzhou 310028, China
  • Received:1992-07-16 Online:1993-09-20 Published:1993-09-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China.

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摘要： Angular distribution of sputtered atoms and the phenomenon of "element local richness relative to microtopographic feature" (ELR-MTF) of the sputtered tar-get surface have been investigated on Cu-37at%Ag alloys by means of Rutherford backscattering spectroscopy technique and a method based on combined scanning electron microscopy and electron probe microanalysis measurements. In this paper, emphasis is put on the bombardment with different doses and angular distributions of sputtered atoms ejecting from various micro-zones on the topographic surface during sputtering. We propose a new model (ELR-MTF model) to interpret the shape of angular distributions and the variation of R-θ (ejection angle of sputtered atoms) curves. This model can qualitatively explain the experiment quite well.

Abstract: Angular distribution of sputtered atoms and the phenomenon of "element local richness relative to microtopographic feature" (ELR-MTF) of the sputtered tar-get surface have been investigated on Cu-37at%Ag alloys by means of Rutherford backscattering spectroscopy technique and a method based on combined scanning electron microscopy and electron probe microanalysis measurements. In this paper, emphasis is put on the bombardment with different doses and angular distributions of sputtered atoms ejecting from various micro-zones on the topographic surface during sputtering. We propose a new model (ELR-MTF model) to interpret the shape of angular distributions and the variation of R-$\theta$ (ejection angle of sputtered atoms) curves. This model can qualitatively explain the experiment quite well.

中图分类号:  (Ion scattering from surfaces (charge transfer, sputtering, SIMS))

  • 68.49.Sf
68.37.Hk (Scanning electron microscopy (SEM) (including EBIC))