中国物理B ›› 2021, Vol. 30 ›› Issue (5): 55205-055205.doi: 10.1088/1674-1056/abd2a4

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Effect of pressure and space between electrodes on the deposition of SiNxHy films in a capacitively coupled plasma reactor

Meryem Grari1,†, CifAllah Zoheir1, Yasser Yousfi2, and Abdelhak Benbrik2   

  1. 1 University Mohamed First, Department of Physics, LETSER Laboratory, Oujda, Morocco;
    2 University Mohamed First, Department of Mathematics, LANO Laboratory, Oujda, Morocco
  • 收稿日期:2020-10-01 修回日期:2020-11-18 接受日期:2020-12-11 出版日期:2021-05-14 发布日期:2021-05-14
  • 通讯作者: Meryem Grari E-mail:grarimery@gmail.com

Effect of pressure and space between electrodes on the deposition of SiNxHy films in a capacitively coupled plasma reactor

Meryem Grari1,?, CifAllah Zoheir1, Yasser Yousfi2, and Abdelhak Benbrik2   

  1. 1 University Mohamed First, Department of Physics, LETSER Laboratory, Oujda, Morocco;
    2 University Mohamed First, Department of Mathematics, LANO Laboratory, Oujda, Morocco
  • Received:2020-10-01 Revised:2020-11-18 Accepted:2020-12-11 Online:2021-05-14 Published:2021-05-14
  • Contact: Meryem Grari E-mail:grarimery@gmail.com

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摘要： The fluid model, also called the macroscopic model, is commonly used to simulate low temperature and low pressure radiofrequency plasma discharges. By varying the parameters of the model, numerical simulation allows us to study several cases, providing us the physico-chemical information that is often difficult to obtain experimentally. In this work, using the fluid model, we employ numerical simulation to show the effect of pressure and space between the reactor electrodes on the fundamental properties of silicon plasma diluted with ammonia and hydrogen. The results show the evolution of the fundamental characteristics of the plasma discharge as a function of the variation of the pressure and the distance between the electrodes. By examining the pressure-distance product in a range between 0.3 Torr 2.7 cm and 0.7 Torr 4 cm, we have determined the optimal pressure-distance product that allows better deposition of hydrogenated silicon nitride (SiNxHy) films which is 0.7 Torr 2.7 cm.

关键词: fluid model, numerical simulation, SiNxHy, capacitively coupled plasma reactor

Abstract: The fluid model, also called the macroscopic model, is commonly used to simulate low temperature and low pressure radiofrequency plasma discharges. By varying the parameters of the model, numerical simulation allows us to study several cases, providing us the physico-chemical information that is often difficult to obtain experimentally. In this work, using the fluid model, we employ numerical simulation to show the effect of pressure and space between the reactor electrodes on the fundamental properties of silicon plasma diluted with ammonia and hydrogen. The results show the evolution of the fundamental characteristics of the plasma discharge as a function of the variation of the pressure and the distance between the electrodes. By examining the pressure-distance product in a range between 0.3 Torr 2.7 cm and 0.7 Torr 4 cm, we have determined the optimal pressure-distance product that allows better deposition of hydrogenated silicon nitride (SiNxHy) films which is 0.7 Torr 2.7 cm.

Key words: fluid model, numerical simulation, SiNxHy, capacitively coupled plasma reactor

中图分类号:  (Plasma simulation)

  • 52.65.-y
52.77.-j (Plasma applications) 52.65.Ww (Hybrid methods) 52.30.-q (Plasma dynamics and flow)