中国物理B ›› 2019, Vol. 28 ›› Issue (6): 68502-068502.doi: 10.1088/1674-1056/28/6/068502
• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇 下一篇
Taha Haddadifam, Mohammad Azim Karami
Taha Haddadifam, Mohammad Azim Karami
摘要:
This paper proposes two optimal designs of single photon avalanche diodes (SPADs) minimizing dark count rate (DCR). The first structure is introduced as p+/pwell/nwell, in which a specific shallow pwell layer is added between p+ and nwell layers to decrease the electric field below a certain threshold. The simulation results show on average 19.7% and 8.5% reduction of p+/nwell structure's DCR comparing with similar previous structures in different operational excess bias and temperatures respectively. Moreover, a new structure is introduced as n+/nwell/pwell, in which a specific shallow nwell layer is added between n+ and pwell layers to lower the electric field below a certain threshold. The simulation results show on average 29.2% and 5.5% decrement of p+/nwell structure's DCR comparing with similar previous structures in different operational excess bias and temperatures respectively. It is shown that in higher excess biases (about 6 volts), the n+/nwell/pwell structure is proper to be integrated as digital silicon photomultiplier (dSiPM) due to low DCR. On the other hand, the p+/pwell/nwell structure is appropriate to be utilized in dSiPM in high temperatures (above 50 ℃) due to lower DCR value.
中图分类号: (Semiconductor-device characterization, design, and modeling)