[1] |
Fleetwood D M, Pantelides S T and Schrimpf R D 2008 Defects in Microelectronic Materials and Devices (Boca Raton:CRC Press) pp. 215-238
|
[2] |
Pacchioni G, Skuja L and Griscom D L 2000 Defects in SiO2 and Related Dielectrics:Science and Technology (New York:Springer Science & Business Media) pp. 529-556
|
[3] |
Devine R A 1988 The Physics and Technology of Amorphous SiO2 (New York:Plenum Press) pp. 259-265
|
[4] |
Deal B E and Helms C R 1993 The Physics and Chemistry of SiO2 and the Si-SiO2 Interface (New York:Springer Science & Business Media) pp. 455-457
|
[5] |
Pease R L, Dunham G W, Seiler J E, Platteter D G and Mcclure S S 2007 IEEE Trans. Nucl. Sci. 54 1049
|
[6] |
Chen X J, Barnaby H J, Vermeire B, Holbert K, Wright D, Pease R L, Dunham G, Platteter D G, Seiler J, McClure S and Adell P 2007 IEEE Trans. Nucl. Sci. 54 1913
|
[7] |
Batyrev I G, Hughart D, Durand R, Bounasser M, Tuttle B R, Fleetwood D M, Schrimpf R D, Rashkeev S N, Dunham G W, Law M and Pantelides S T 2008 IEEE Trans. Nucl. Sci. 55 3039
|
[8] |
Rashkeev S N, Fleetwood D M, Schrimpf R D and Pantelides S T 2004 IEEE Trans. Nucl. Sci. 51 3158
|
[9] |
Oldham T R and McLean F B 2003 IEEE Trans. Nucl. Sci. 50 483
|
[10] |
Rashkeev S N, Fleetwood D M, Schrimpf R D and Pantelides S T 2001 Phys. Rev. Lett. 87 165506
|
[11] |
Pease R L, Adell P C, Rax B G, Chen X J, Barnaby H J, Holbert K E and Hjalmarson H P 2008 IEEE Trans. Nucl. Sci. 55 3169
|
[12] |
Fleetwood D M, Schrimpf R D, Pantelides S T, Pease R L and Dunham G W 2008 IEEE Trans. Nucl. Sci. 55 2986
|
[13] |
Pantelides S T, Tsetseris L, Rashkeev S N, Zhou X J, Fleetwood D M and Schrimpf R D 2007 Microelectron. Reliab. 47 903
|
[14] |
Conley J F and Lenahan P M 1993 IEEE Trans. Nucl. Sci. 40 1335
|
[15] |
Conley J F and Lenahan P M 1993 Appl. Phys. Lett. 62 40
|
[16] |
Van Ginhoven R M, Hjalmarson H P, Edwards A H and Tuttle B R 2006 Nucl. Instrum. Methods Phys. Res., Sect. B 250 274
|
[17] |
Tuttle B R, Hughart D R, Schrimpf R D, Fleetwood D M and Pantelides S T 2010 IEEE Trans. Nucl. Sci. 57 3046
|
[18] |
Shen X, Puzyrev Y S, Fleetwood D M, Schrimpf R D and Pantelides S T 2015 IEEE Trans. Nucl. Sci. 62 2169
|
[19] |
Rowsey N L, Law M E, Schrimpf R D, Fleetwood D M, Tuttle B R and Pantelides S T 2011 IEEE Trans. Nucl. Sci. 58 2937
|
[20] |
Silsbee R H 1961 J. Appl. Phys. 32 1459
|
[21] |
Jani M G, Bossoli R B and Halliburton L E 1983 Phys. Rev. B 27 2285
|
[22] |
Rudra J K, Fowler W B and Feigl F J 1985 Phys. Rev. Lett. 55 2614
|
[23] |
Isoya J, Weil J and Halliburton L 1981 J. Chem. Phys. 74 5436
|
[24] |
Vitiello M, Lopez N, Illas F and Pacchioni G 2000 J. Phys. Chem. A 104 4674
|
[25] |
Kresse G and Furthmüller J 1996 Comput. Mater. Sci. 6 15
|
[26] |
Kresse G and Joubert D 1999 Phys. Rev. B 59 1758
|
[27] |
Blöchl P E 1994 Phys. Rev. B 50 17953
|
[28] |
Perdew J P, Burke K and Ernzerhof M 1996 Phys. Rev. Lett. 77 3865
|
[29] |
Levien L, Prewitt C T and Weidner D J 1980 Am. Mineral. 65 920
|
[30] |
Henkelman G, Uberuaga B P and Jónsson H 2000 J. Chem. Phys. 113 9901
|
[31] |
Alkauskas A, Broqvist P, Devynck F and Pasquarello A 2008 Phys. Rev. Lett. 101 106802
|
[32] |
Stahlbush R E, Mrstik B J and Lawrence R K 1990 IEEE Trans. Nucl. Sci. 37 1641
|
[33] |
Stahlbush R E, Edwards A H, Griscom D L and Mrstik B J 1993 J. Appl. Phys. 73 658
|
[34] |
Snyder K C and Fowler W B 1993 Phys. Rev. B 48 13238
|
[35] |
Blöchl P E 2000 Phys. Rev. B 62 6158
|
[36] |
Boero M, Pasquarello A, Sarnthein J and Car R 1997 Phys. Rev. Lett. 78 887
|
[37] |
Godet J and Pasquarello A 2005 Microelectron. Eng. 80 288
|
[38] |
Sushko P V, Mukhopadhyay S, Mysovsky A S, Sulimov V B, Taga A and Shluger A L 2005 J. Phys.:Condens. Matter 17 S2115
|
[39] |
Girard S, Richard N, Ouerdane Y, Origlio G, Boukenter A, Martin-Samos L, Paillet P, Meunier J P, Baggio J and Cannas M 2008 IEEE Trans. Nucl. Sci. 55 3508
|
[40] |
Lu Z Y, Nicklaw C J, Fleetwood D M, Schrimpf R D and Pantelides S T 2002 Phys. Rev. Lett. 89 285505
|
[41] |
Griscom D L 1985 J. Appl. Phys. 58 2524
|
[42] |
Griscom D L 1985 J. Non-Cryst. Solids 73 51
|
[43] |
Griscom D L 1991 J. Ceram. Soc. Jpn. 99 923
|
[44] |
Griscom D L 1984 Nucl. Instrum. Methods Phys. Res., Sect. B 1 481
|
[45] |
Godet J, Giustino F and Pasquarello A 2007 Phys. Rev. Lett. 99 126102
|