[1] |
Cheng C, Zhang L Y and Zhan R 2006 Surf. Coat. Technol. 200 6659
|
[2] |
Walsh J L and Kong M G 2008 Appl. Phys. Lett. 93 111501
|
[3] |
Schäfer J, Foest R, Quade A, Ohl A and Weltmann K D 2008 J. Phys. D: Appl. Phys. 41 194010
|
[4] |
Weltmann K, Kindel E, Brandenburg R, Meyer C, Bussiahn R, Wilke C and Woedtke T 2009 Contrib. Plasma Phys. 49 631
|
[5] |
Huang C, Yu Q, Hsieh F and Duan Y 2007 Plasma Proces. Polym. 4 77
|
[6] |
Cheng C, Liu P, Xu L, Zhang LY, Zhan R J and Zhang W R 2006 Chin. Phys. 15 1544
|
[7] |
Uhm H S, Lim J P and Li S Z 2007 Appl. Phys. Lett. 90 261501
|
[8] |
Lim J P, Uhm H S and Li S Z 2007 Phys. Plasmas 14 093504
|
[9] |
Arnoult G, Cardoso R P, Belmonte T and Henrion G 2008 Appl. Phys. Lett. 93 191507.
|
[10] |
Shashurin A, Keidar M, Bronnikov S, Jurjus R A and Stepp M A 2008 Appl. Phys. Lett. 93 181501
|
[11] |
Qian M, Ren C, Wang D, Zhang J and Wei G 2010 J. Appl. Phys. 107 063303
|
[12] |
Ayan H, Yildirim E D, Pappas D D and Sun W 2011 Appl. Phys. Lett. 99 111502
|
[13] |
Cao Z, Walsh J L and Kong M G 2009 Appl. Phys. Lett. 94 021501
|
[14] |
Li Q, Li J, Zhu W, Zhu X and Pu Y 2009 Appl. Phys. Lett. 95 141502
|
[15] |
Sarani A, Nikiforov A Y and Leys C 2010 Phys. Plasmas 17 063504
|
[16] |
Nikiforov A Y, Sarani A and Leys C 2011 Plasma Sources Sci. Technol. 20 015014
|
[17] |
Kang S K, Choi M Y, Koo I G, Kim P Y, Kim Y, Kim G J, Mohamed A H, Collins G J and Lee J K 2011 Appl. Phys. Lett. 98 143702
|
[18] |
Deng S Xi, Cheng C, Ni G H, Meng Y D and Chen H 2010 Chin. Phys. B 19 105203
|
[19] |
Deng S X, Cheng C, Ni G H, Meng Y D and Chen H 2010 Curr. Appl. Phys. 10 1164
|
[20] |
Srivastava N and Wang C 2011 IEEE Trans. Plasma Sci. 39 918
|
[21] |
Srivastava N and Wang C 2011 J. Appl. Phys. 110 053304
|
[22] |
Wang C and Srivastava N 2010 Eur. Phys. J. D 60 465
|
[23] |
Kim K, Choi J D, Hong Y C, Kim G, Noh E J, Lee J and Yang S S 2011 Appl. Phys. Lett. 98 073701
|
[24] |
Kim S J, Chung T H, Bae S H and Leem S H 2009 Appl. Phys. Lett. 94 141502
|
[25] |
Xiong Z, Lu X, Xian Y, Jiang Z and Pan Y 2010 J. Appl. Phys. 108 103303
|
[26] |
O'Connora N and Daniels S J 2011 Appl. Phys. 110 013308
|
[27] |
Walsh J L and Kong M G 2011 Appl. Phys. Lett. 99 081501
|
[28] |
Liu J J and Kong M G 2011 J. Phys. D: Appl. Phys. 44 345203
|
[29] |
Sun P, Sun Y, Wu H, Zhu W, Lopez J L, Liu W, Zhang J, Li R and Fang J 2011 Appl. Phys. Lett. 98 021501
|
[30] |
Kolb J F, Mohamed A H, Price R O, Swanson R J, Bowman A, Chiavarini R L, Stacey M and Schoenbach K H 2008 Appl. Phys. Lett. 92 241501
|
[31] |
Xiong Q, Lu X P, Ostrikov K, Xian Y, Zou C, Xiong Z and Pan Y 2010 Phys. Plasmas 17 043506
|
[32] |
Laroussi M 2009 IEEE Trans. Plasma Sci. 37 714
|
[33] |
Nagatsu M, Terashita F, Nonaka H, Xu L, Nagata T and Koide Y 2005 Appl. Phys. Lett. 86 211502
|
[34] |
Zhao Y, Ogino A and Nagatsua M 2011 Appl. Phys. Lett. 98 191501
|
[35] |
Perni S, Shama G, Hobman J L, Lund P A, Kershaw C J, Hidalgo-Arroyo G A, Penn C W, Deng X T, Walsh J L and Kong M G 2007 Appl. Phys. Lett. 90 073902
|
[36] |
Shen J, Cheng C, Fang S, Xie H, Lan Y, Ni G, Meng Y, Luo J and Wang X 2012 Appl. Phys. Express 5 036201
|
[37] |
Zhu X M, Chen W C and Pu Y K 2008 J. Phys. D: Appl. Phys. 41 105212
|
[38] |
Bruggeman P, Verreycken T, Gonzalez M, Walsh J L, Kong M G, Leys C and Schram D C 2010 J. Phys. D: Appl. Phys. 43 124005
|
[39] |
Zhang J, Bian X, Chen Q, Liu F and Liu Z 2009 Chin. Phys. Lett. 26 035203
|
[40] |
Sáinz A and García M C 2008 Spectrochim. Acta Part B 63 948
|
[41] |
Torres J, Jonkers J, van de Sanden M J, van der Mullen J J A M, Gamero A and Sola A 2003 J. Phys. D: Appl. Phys. 36 L55
|
[42] |
Balcon N, Aanesland A and Boswell R 2007 Plasma Sources Sci. Technol. 16 217
|
[43] |
Torres J, van de Sande M J, van der Mullen J J A M, Gamero A and Sola A 2006 Spectrochim. Acta Part B 61 58
|
[44] |
Torres J, Palomares J M, Sola A, van der Mullen J J A M and Gamero A 2007 J. Phys. D: Appl. Phys. 40 5929
|
[45] |
Konjevic R and Konjevic N 1997 Spectrochim. Acta Part B 52 2077
|