中国物理B ›› 2014, Vol. 23 ›› Issue (11): 114601-114601.doi: 10.1088/1674-1056/23/11/114601
• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇 下一篇
李玉金, 元秀华
Li Yu-Jin (李玉金), Yuan Xiu-Hua (元秀华)
摘要:
Based on cavity resonance and sandwich composite plate theory, this paper presents a universal three-dimensional (3D) theoretical model for frequency dispersion characterization and displacement profile shapes of the film bulk acoustic resonator (FBARs). This model provides results of FBAR excited thickness-extensional and flexure modes, and the result of frequency dispersion is proposed in which the thicknesses and impedance of the electrodes and the piezoelectric material are taken into consideration; its further simplification shows good agreement with the modified Butterworth-Van-Dyke (MBVD) model. The displacement profile reflects the vibration stress distribution of electrode shapes and the lateral resonance effect, which depends on the axis ratio of the electrode shapes a/b. The results are consistent with the 3D finite element method modeling and laser interferometry measurement in general.
中图分类号: (Vibrations and mechanical waves)