中国物理B ›› 2001, Vol. 10 ›› Issue (4): 320-323.doi: 10.1088/1009-1963/10/4/311

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THE INFLUENCE OF ELECTRON OSCILLATION ON PLASMA TRANSPORT THROUGH A MAGNETIC DUCT

郭达勤1, 朱剑豪1, 张涛2, I. G. Brown3   

  1. (1)Department of Physics and Materials Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong, China; (2)Institute of Low Energy Nuclear Physics, Beijing Radiation Center, Beijing Normal University, Beijing 100875, China; Department of Physics and Materials Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong, China; (3)Lawrence Berkeley National Laboratory, University of California, Berkeley, CA 94720, USA
  • 收稿日期:2000-10-13 修回日期:2000-12-19 出版日期:2001-04-15 发布日期:2005-06-12
  • 基金资助:
    Project supported by the Hong Kong Research Grants Council Earmarked (Grant Nos. 9040412 and 9040344), Beijing Science and Technology New Star Plan (Grant No. 952870400) as well as Beijing Natural Science Foundation (Grant No.1002005).

THE INFLUENCE OF ELECTRON OSCILLATION ON PLASMA TRANSPORT THROUGH A MAGNETIC DUCT

Zhang Tao (张涛)ab, T. K. Kwok (郭达勤)b, P. K. Chu (朱剑豪)b, I. G. Brownc   

  1. a Institute of Low Energy Nuclear Physics, Beijing Radiation Center, Beijing Normal University, Beijing 100875, China; b Department of Physics and Materials Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong, China; c Lawrence Berkeley National Laboratory, University of California, Berkeley, CA 94720, USA
  • Received:2000-10-13 Revised:2000-12-19 Online:2001-04-15 Published:2005-06-12
  • Supported by:
    Project supported by the Hong Kong Research Grants Council Earmarked (Grant Nos. 9040412 and 9040344), Beijing Science and Technology New Star Plan (Grant No. 952870400) as well as Beijing Natural Science Foundation (Grant No.1002005).

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摘要： A magnetic duct is inserted between the cathodic arc plasma source and the chamber to eliminate the macroparticles. In this paper, the plasma output of the magnetic duct is determined as a function of the magnetic field and the bias voltage under the Bilek biasing mode and entire duct biasing mode. The computer simulation and the experimental result indicate that the ${\vec E}\times{\vec B}$ drift results in an extra diffusion flux under the Bilek biasing mode. The test verifying the electron oscillation was conducted in the magnetic duct biased in the Bilek mode. The electron behaviour under Bilek biasing mode is different from that under entire duct biasing mode. The Bilek biasing mode has a lower plasma output than the entire duct biasing mode.

Abstract: A magnetic duct is inserted between the cathodic arc plasma source and the chamber to eliminate the macroparticles. In this paper, the plasma output of the magnetic duct is determined as a function of the magnetic field and the bias voltage under the Bilek biasing mode and entire duct biasing mode. The computer simulation and the experimental result indicate that the $\vec{E}\times\vec{B}$ drift results in an extra diffusion flux under the Bilek biasing mode. The test verifying the electron oscillation was conducted in the magnetic duct biased in the Bilek mode. The electron behaviour under Bilek biasing mode is different from that under entire duct biasing mode. The Bilek biasing mode has a lower plasma output than the entire duct biasing mode.

Key words: cathodic arc plasma, plasma transport, magnetic duct, computer simulation

中图分类号:  (Transport properties)

  • 52.25.Fi
52.50.Dg (Plasma sources)