Optimization of large-area YBa2Cu3O7-δ thin films by pulsed laser deposition for planar microwave devices

doi:10.1088/1674-1056/accb4d

中国物理B ›› 2023, Vol. 32 ›› Issue (7): 77402-077402.doi: 10.1088/1674-1056/accb4d

Optimization of large-area YBa₂Cu₃O_7-δ thin films by pulsed laser deposition for planar microwave devices

Pei-Yu Xiong(熊沛雨)^1,2, Fu-Cong Chen(陈赋聪)², Zhong-Pei Feng(冯中沛)³, Jing-Ting Yang(杨景婷)³, Yu-Dong Xia(夏钰东)^3,4, Yue-Feng Yuan(袁跃峰)², Xu Wang(王旭)², Jie Yuan(袁洁)², Yun Wu(吴云)^2,†, Jing Shi(石兢)^1,‡, and Kui Jin(金魁)²

1 School of Physical Science and Technology, Wuhan University, Wuhan 430072, China;
2 Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100490, China;
3 Songshan Lake Materials Laboratory, Dongguan 523808, China;
4 School of Physical Science and Technology, Southwest Jiaotong University, Chengdu 611756, China

收稿日期:2023-03-01 修回日期:2023-03-25 接受日期:2023-04-07 出版日期:2023-06-15 发布日期:2023-06-21
通讯作者: Yun Wu, Jing Shi E-mail:wuyun@iphy.ac.cn;jshi@whu.edu.cn
基金资助:
Project supported by the National Key Basic Research Program of China (Grant Nos. 2022YFA1603903 and 2021YFA0718700), the Key-Area Research and Development Program of Guangdong Province, China (Grant No. 2020B0101340002), the National Natural Science Foundation of China (Grant Nos. 61971415, 51972012, 11927808, 119611410, 11961141008, and 12274439), the Strategic Priority Research Program (B) of Chinese Academy of Sciences (Grant No. XDB25000000), Beijing Natural Science Foundation (Grant No. Z190008), and Basic Research Youth Team of Chinese Academy of Sciences (Grant No. 2022YSBR-048).

Optimization of large-area YBa₂Cu₃O_7-δ thin films by pulsed laser deposition for planar microwave devices

1 School of Physical Science and Technology, Wuhan University, Wuhan 430072, China;
2 Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100490, China;
3 Songshan Lake Materials Laboratory, Dongguan 523808, China;
4 School of Physical Science and Technology, Southwest Jiaotong University, Chengdu 611756, China

Received:2023-03-01 Revised:2023-03-25 Accepted:2023-04-07 Online:2023-06-15 Published:2023-06-21
Contact: Yun Wu, Jing Shi E-mail:wuyun@iphy.ac.cn;jshi@whu.edu.cn
Supported by:
Project supported by the National Key Basic Research Program of China (Grant Nos. 2022YFA1603903 and 2021YFA0718700), the Key-Area Research and Development Program of Guangdong Province, China (Grant No. 2020B0101340002), the National Natural Science Foundation of China (Grant Nos. 61971415, 51972012, 11927808, 119611410, 11961141008, and 12274439), the Strategic Priority Research Program (B) of Chinese Academy of Sciences (Grant No. XDB25000000), Beijing Natural Science Foundation (Grant No. Z190008), and Basic Research Youth Team of Chinese Academy of Sciences (Grant No. 2022YSBR-048).

摘要/Abstract

摘要： This paper presents high quality YBa₂Cu₃O_7-δ (YBCO) thin films on LaAlO₃ substrate for microwave devices prepared by pulsed laser deposition (PLD). The double-sided YBCO films cover a large area and have been optimized for key parameters relevant to microwave device applications, such as surface morphology and surface resistance (R_s). This was achieved by improving the target quality and increasing the oxygen pressure during deposition, respectively. To evaluate the suitability of the YBCO films for microwave devices, a pair of microwave filters based on microstrip fabricated on films from this work and a commercial company were compared. The results show that the YBCO films in this work could completely meet the requirements for microwave devices.

关键词: YBCO films, pulsed laser deposition (PLD), surface resistance, microwave devices

Abstract: This paper presents high quality YBa₂Cu₃O_7-δ (YBCO) thin films on LaAlO₃ substrate for microwave devices prepared by pulsed laser deposition (PLD). The double-sided YBCO films cover a large area and have been optimized for key parameters relevant to microwave device applications, such as surface morphology and surface resistance (R_s). This was achieved by improving the target quality and increasing the oxygen pressure during deposition, respectively. To evaluate the suitability of the YBCO films for microwave devices, a pair of microwave filters based on microstrip fabricated on films from this work and a commercial company were compared. The results show that the YBCO films in this work could completely meet the requirements for microwave devices.

Key words: YBCO films, pulsed laser deposition (PLD), surface resistance, microwave devices

中图分类号: (Superconducting films and low-dimensional structures)

74.78.-w

81.15.Fg (Pulsed laser ablation deposition) 84.37.+q (Measurements in electric variables (including voltage, current, resistance, capacitance, inductance, impedance, and admittance, etc.)) 85.25.-j (Superconducting devices)

Pei-Yu Xiong(熊沛雨), Fu-Cong Chen(陈赋聪), Zhong-Pei Feng(冯中沛), Jing-Ting Yang(杨景婷), Yu-Dong Xia(夏钰东), Yue-Feng Yuan(袁跃峰), Xu Wang(王旭), Jie Yuan(袁洁), Yun Wu(吴云), Jing Shi(石兢), and Kui Jin(金魁). Optimization of large-area YBa₂Cu₃O_7-δ thin films by pulsed laser deposition for planar microwave devices[J]. 中国物理B, 2023, 32(7): 77402-077402.

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Optimization of large-area YBa₂Cu₃O_7-δ thin films by pulsed laser deposition for planar microwave devices

Optimization of large-area YBa₂Cu₃O_7-δ thin films by pulsed laser deposition for planar microwave devices

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