Bending sensor based on flexible spin valve

doi:10.1088/1674-1056/ac8923

中国物理B ›› 2023, Vol. 32 ›› Issue (5): 57502-057502.doi: 10.1088/1674-1056/ac8923

Bending sensor based on flexible spin valve

L I Naumova^†, R S Zavornitsyn, M A Milyaev, N G Bebenin, A Y Pavlova, M V Makarova, I K Maksimova, V V Proglyado, A A Zakharov, and V V Ustinov

M. N. Miheev Institute of Metal Physics, Ural Branch, Russian Academy of Sciences, S. Kovalevskoi Street 18, Ekaterinburg 620990, Russia

收稿日期:2022-06-07 修回日期:2022-08-01 接受日期:2022-08-12 出版日期:2023-04-21 发布日期:2023-04-26
通讯作者: L I Naumova E-mail:naumova@imp.uran.ru
基金资助:
This study was performed within the framework of State Assignment from the Ministry of Education and Science of Russian Federation (topic Spin, No. 122021000036-3 and topic Magnet, No. 122021000034-9) and partially supported by the Russian Foundation for Basic Research (project No. 20-42-660018).

Bending sensor based on flexible spin valve

L I Naumova^†, R S Zavornitsyn, M A Milyaev, N G Bebenin, A Y Pavlova, M V Makarova, I K Maksimova, V V Proglyado, A A Zakharov, and V V Ustinov

M. N. Miheev Institute of Metal Physics, Ural Branch, Russian Academy of Sciences, S. Kovalevskoi Street 18, Ekaterinburg 620990, Russia

Received:2022-06-07 Revised:2022-08-01 Accepted:2022-08-12 Online:2023-04-21 Published:2023-04-26
Contact: L I Naumova E-mail:naumova@imp.uran.ru
Supported by:
This study was performed within the framework of State Assignment from the Ministry of Education and Science of Russian Federation (topic Spin, No. 122021000036-3 and topic Magnet, No. 122021000034-9) and partially supported by the Russian Foundation for Basic Research (project No. 20-42-660018).

摘要/Abstract

摘要： Flexible spin valves were prepared by magnetron sputtering on polyimide substrates. The buffer layer that reduces significantly the effect of the polymer substrate on the spin valve microstructure and magnetoresistive properties was revealed. Bending deformation was applied to the microobjects based on the flexible spin valves in parallel to anisotropy axes. It was revealed that during the bend the magnetoresistance changes due to the joint impact of both the change of the magnetic field projection on the film plane and the change of the magnetic properties of the ferromagnetic layers. The obtained dependences have been used in construction of bending sensor, in which the flexible spin valve microstripes were united into the Wheatstone bridge.

关键词: spin valve, polymer substrate, magnetostriction, magnetic anisotropy

Abstract: Flexible spin valves were prepared by magnetron sputtering on polyimide substrates. The buffer layer that reduces significantly the effect of the polymer substrate on the spin valve microstructure and magnetoresistive properties was revealed. Bending deformation was applied to the microobjects based on the flexible spin valves in parallel to anisotropy axes. It was revealed that during the bend the magnetoresistance changes due to the joint impact of both the change of the magnetic field projection on the film plane and the change of the magnetic properties of the ferromagnetic layers. The obtained dependences have been used in construction of bending sensor, in which the flexible spin valve microstripes were united into the Wheatstone bridge.

Key words: spin valve, polymer substrate, magnetostriction, magnetic anisotropy

中图分类号: (Magnetomechanical effects, magnetostriction)

75.80.+q

68.55.J- (Morphology of films) 68.65.Ac (Multilayers) 73.43.Qt (Magnetoresistance)

L I Naumova, R S Zavornitsyn, M A Milyaev, N G Bebenin, A Y Pavlova, M V Makarova, I K Maksimova, V V Proglyado, A A Zakharov, and V V Ustinov. Bending sensor based on flexible spin valve[J]. 中国物理B, 2023, 32(5): 57502-057502.

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Bending sensor based on flexible spin valve

Bending sensor based on flexible spin valve

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