中国物理B ›› 2016, Vol. 25 ›› Issue (10): 107805-107805.doi: 10.1088/1674-1056/25/10/107805
• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇 下一篇
Xiang-Jun Shang(尚向军), Jian-Xing Xu(徐建星), Ben Ma(马奔), Ze-Sheng Chen(陈泽升), Si-Hang Wei(魏思航), Mi-Feng Li(李密峰), Guo-Wei Zha(查国伟), Li-Chun Zhang(张立春), Ying Yu(喻颖), Hai-Qiao Ni(倪海桥), Zhi-Chuan Niu(牛智川)
Xiang-Jun Shang(尚向军)1,2, Jian-Xing Xu(徐建星)1,2, Ben Ma(马奔)1,2, Ze-Sheng Chen(陈泽升)1,2, Si-Hang Wei(魏思航)1,2, Mi-Feng Li(李密峰)1,2, Guo-Wei Zha(查国伟)1,2, Li-Chun Zhang(张立春)1,2, Ying Yu(喻颖)1,2, Hai-Qiao Ni(倪海桥)1,2, Zhi-Chuan Niu(牛智川)1,2
摘要: The test-QD in-situ annealing method could surmount the critical nucleation condition of InAs/GaAs single quantum dots (SQDs) to raise the growth repeatability. Here, through many growth tests on rotating substrates, we develop a proper In deposition amount (θ) for SQD growth, according to the measured critical θ for test QD nucleation (θc). The proper ratio θ/θc, with a large tolerance of the variation of the real substrate temperature (Tsub), is 0.964-0.971 at the edge and >0.989 but <0.996 in the center of a 1/4-piece semi-insulating wafer, and around 0.9709 but <0.9714 in the center of a 1/4-piece N+ wafer as shown in the evolution of QD size and density as θ/θc varies. Bright SQDs with spectral lines at 905 nm-935 nm nucleate at the edge and correlate with individual 7 nm-8 nm-height QDs in atomic force microscopy, among dense 1 nm-5 nm-height small QDs with a strong spectral profile around 860 nm-880 nm. The higher Tsub in the center forms diluter, taller and uniform QDs, and very dilute SQDs for a proper θ/θc: only one 7-nm-hight SQD in 25 μm2. On a 2-inch (1 inch=2.54 cm) semi-insulating wafer, by using θ/θc = 0.961, SQDs nucleate in a circle in 22% of the whole area. More SQDs will form in the broad high-Tsub region in the center by using a proper θ/θc.
中图分类号: (Quantum dots)