中国物理B ›› 2015, Vol. 24 ›› Issue (6): 68501-068501.doi: 10.1088/1674-1056/24/6/068501
• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇 下一篇
High efficiency, large-active-area superconducting nanowire single-photon detectors
顾敏a, 张蜡宝a, 康琳a, 赵清源a, 郏涛a, 万超a, 徐睿莹a, 杨小忠a, 吴培亨a, 张永b, 夏金松b
- a Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering,Nanjing University, Nanjing 210093, China;
b Wuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information,Huazhong University of Science and Technology, Wuhan 430074, China
High efficiency, large-active-area superconducting nanowire single-photon detectors
Gu Min (顾敏)a, Zhang La-Bao (张蜡宝)a, Kang Lin (康琳)a, Zhao Qing-Yuan (赵清源)a, Jia Tao (郏涛)a, Wan Chao (万超)a, Xu Rui-Ying (徐睿莹)a, Yang Xiao-Zhong (杨小忠)a, Wu Pei-Heng (吴培亨)a, Zhang Yong (张永)b, Xia Jin-Song (夏金松)b
- a Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering,Nanjing University, Nanjing 210093, China;
b Wuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information,Huazhong University of Science and Technology, Wuhan 430074, China
摘要：
Niobium nitride superconducting nanowire single-photon detectors were fabricated on thermally oxidized silicon substrates with large active areas of 30 μm × 30 μm. To achieve non-constricted detectors, we improved the film growth and electron beam lithography process to fabricate uniform 100-nm wide NbN nanowires with a fill factor of 50%. The devices showed 72.4% system detection efficiency (SDE) at 100-Hz dark count rate (DCR) and 74-ps timing jitter, measured at the fiber communication wavelength of 1550 nm. The highest SDE which is 81.2% when the DCR is ～700 c/s appears at the wavelength of 1650 nm.
中图分类号: (Superconducting infrared, submillimeter and millimeter wave detectors)
- 85.25.Pb