Influence of the illumination coherency and illumination aperture on the ptychographic iterative microscopy

doi:10.1088/1674-1056/24/2/024201

中国物理B ›› 2015, Vol. 24 ›› Issue (2): 24201-024201.doi: 10.1088/1674-1056/24/2/024201

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇下一篇

Influence of the illumination coherency and illumination aperture on the ptychographic iterative microscopy

刘诚^{a b}, 朱健强^a, John Rodenburg^b

a Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;
b Department of Electronic and Electric Engineering, University of Sheffield, UK

收稿日期:2014-07-07 修回日期:2014-09-16 出版日期:2015-02-05 发布日期:2015-02-05

Influence of the illumination coherency and illumination aperture on the ptychographic iterative microscopy

Liu Cheng (刘诚)^{a b}, Zhu Jian-Qiang (朱健强)^a, John Rodenburg^b

a Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;
b Department of Electronic and Electric Engineering, University of Sheffield, UK

Received:2014-07-07 Revised:2014-09-16 Online:2015-02-05 Published:2015-02-05
Contact: Liu Cheng E-mail:chengliu@siom.ac.cn

摘要/Abstract

摘要： While ptychography is an algorithm based on coherent illumination, satisfactory reconstructions can still be generated in most experiments, even though the radiation sources that are used are not ideally coherent. The underlying physics of this phenomenon is that the diffraction patterns of partially coherent illumination can be treated as those of purely coherent illumination by altering the intensities of the diffracted beams relative to their real values. On the other hand, due to the inconsistency in the altering interference among all the diffraction beams, noise/distortion is always involved in the reconstructed images. Furthermore, for a weak object, the noise/distortion in the reconstruction can be mostly reduced by using a highly curved beam for illumination in the data recording and forcing the dark field diffraction to be zero in the reconstruction.

关键词: coherent diffraction imaging, partial coherence, phase retrieval

Abstract: While ptychography is an algorithm based on coherent illumination, satisfactory reconstructions can still be generated in most experiments, even though the radiation sources that are used are not ideally coherent. The underlying physics of this phenomenon is that the diffraction patterns of partially coherent illumination can be treated as those of purely coherent illumination by altering the intensities of the diffracted beams relative to their real values. On the other hand, due to the inconsistency in the altering interference among all the diffraction beams, noise/distortion is always involved in the reconstructed images. Furthermore, for a weak object, the noise/distortion in the reconstruction can be mostly reduced by using a highly curved beam for illumination in the data recording and forcing the dark field diffraction to be zero in the reconstruction.

Key words: coherent diffraction imaging, partial coherence, phase retrieval

中图分类号: (Phase retrieval)

42.30.Rx

42.25.Kb (Coherence) 61.72.Ff (Direct observation of dislocations and other defects (etch pits, decoration, electron microscopy, x-ray topography, etc.))

刘诚, 朱健强, John Rodenburg. Influence of the illumination coherency and illumination aperture on the ptychographic iterative microscopy[J]. 中国物理B, 2015, 24(2): 24201-024201.

Liu Cheng (刘诚), Zhu Jian-Qiang (朱健强), John Rodenburg. Influence of the illumination coherency and illumination aperture on the ptychographic iterative microscopy[J]. Chin. Phys. B, 2015, 24(2): 24201-024201.

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Influence of the illumination coherency and illumination aperture on the ptychographic iterative microscopy

Influence of the illumination coherency and illumination aperture on the ptychographic iterative microscopy

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