中国物理B ›› 2015, Vol. 24 ›› Issue (11): 116201-116201.doi: 10.1088/1674-1056/24/11/116201

• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇    下一篇

Relationship between bias voltage and microstructureas well as properties of CrAlYN films

付英英a b, 李红轩a, 吉利a, 刘晓红a, 刘流c, 周惠娣a, 陈建敏a   

  1. a State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China;
    b University of Chinese Academy of Sciences, Beijing 100049, China;
    c School of Life Science of Chemistry, Tianshui Normal University, Tianshui 741000, China
  • 收稿日期:2015-01-11 修回日期:2015-07-24 出版日期:2015-11-05 发布日期:2015-11-05
  • 通讯作者: Ji Li, Chen Jian-Min E-mail:jili@licp.cas.cn;Chenjm@licp.cas.cn
  • 基金资助:
    Project supported by the National Basic Research Program of China (Grant No. 2013CB632302) and the National Natural Science Foundation of China (Grant No. 51175491).

Relationship between bias voltage and microstructureas well as properties of CrAlYN films

Fu Ying-Ying (付英英)a b, Li Hong-Xuan (李红轩)a, Ji Li (吉利)a, Liu Xiao-Hong (刘晓红)a, Liu Liu (刘流)c, Zhou Hui-Di (周惠娣)a, Chen Jian-Min (陈建敏)a   

  1. a State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China;
    b University of Chinese Academy of Sciences, Beijing 100049, China;
    c School of Life Science of Chemistry, Tianshui Normal University, Tianshui 741000, China
  • Received:2015-01-11 Revised:2015-07-24 Online:2015-11-05 Published:2015-11-05
  • Contact: Ji Li, Chen Jian-Min E-mail:jili@licp.cas.cn;Chenjm@licp.cas.cn
  • Supported by:
    Project supported by the National Basic Research Program of China (Grant No. 2013CB632302) and the National Natural Science Foundation of China (Grant No. 51175491).

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摘要： In this work, a series of CrAlYN films doped with 1 at.% yttrium were deposited by unbalanced reactive magnetron sputtering under different bias voltages. The effects of bias voltage on microstructure and properties of the CrAlYN films were subsequently investigated. It is found that all the as-deposited films have similar chemical composition and crystalline structure. However, the bias voltage has significant impact on the mechanical properties and oxidation resistance of the resulting films. Namely, the film deposited at 100 V has the highest hardness and best oxidation resistance, which are mainly attributed to its denser structure and higher Al content than others. In addition, the film obtained at 100 V exhibits superior oxidation resistance even at 1000 ℃, and good friction and wear properties at 600 and 800 ℃, and the latter two are mainly ascribed to the formation of compact transfer layer on the worn surfaces. However, this film experienced obvious wear loss at low testing temperatures (i.e., 200 and 400 ℃) due to the serious abrasive wear.

关键词: CrAlYN film, bias voltage, microstructure, properties

Abstract: In this work, a series of CrAlYN films doped with 1 at.% yttrium were deposited by unbalanced reactive magnetron sputtering under different bias voltages. The effects of bias voltage on microstructure and properties of the CrAlYN films were subsequently investigated. It is found that all the as-deposited films have similar chemical composition and crystalline structure. However, the bias voltage has significant impact on the mechanical properties and oxidation resistance of the resulting films. Namely, the film deposited at 100 V has the highest hardness and best oxidation resistance, which are mainly attributed to its denser structure and higher Al content than others. In addition, the film obtained at 100 V exhibits superior oxidation resistance even at 1000 ℃, and good friction and wear properties at 600 and 800 ℃, and the latter two are mainly ascribed to the formation of compact transfer layer on the worn surfaces. However, this film experienced obvious wear loss at low testing temperatures (i.e., 200 and 400 ℃) due to the serious abrasive wear.

Key words: CrAlYN film, bias voltage, microstructure, properties

中图分类号:  (Friction, tribology, and hardness)

  • 62.20.Qp
68.55.-a (Thin film structure and morphology) 68.60.Dv (Thermal stability; thermal effects)