Chin. Phys. B ›› 2013, Vol. 22 ›› Issue (1): 14203-014203.doi: 10.1088/1674-1056/22/1/014203
• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇 下一篇
乔闹生a b, 邹北骥a
Qiao Nao-Sheng (乔闹生)a b, Zou Bei-Ji (邹北骥)a
摘要: In Fourier transform profilometry (FTP), we must restrain spectrum overlapping caused by the nonlinearity of charge coupled device (CCD) and increase the measurement accuracy of object shape. Firstly, the causes of producing higher-order spectrum components and inducing spectrum overlapping are analysed theoretically, and simple physical explanation and analytical deduction are given. Secondly, aiming to suppress spectrum overlapping and improve measurement accuracy, the influence of spatial carrier frequency of projection grating on them is analysed. A method of increasing the spatial carrier frequency of projection grating to restrain or reduce the spectrum overlapping significantly is proposed. We then analyze the mechanism of how the spectrum overlapping is reduced. Finally, the simulation results and experimental measurements verify the correction of the theory and method proposed.
中图分类号: (Imaging and optical processing)