中国物理B ›› 2012, Vol. 21 ›› Issue (7): 75202-075202.doi: 10.1088/1674-1056/21/7/075202

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

Numerical study on characteristics of nitrogen discharge at high pressure with induced plasma

王一男, 刘悦, 郑殊, 林国强   

  1. Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China
  • 收稿日期:2011-11-09 修回日期:2012-02-09 出版日期:2012-06-01 发布日期:2012-06-01
  • 基金资助:
    Project supported by the National Science Foundation of China (Grant No. 10675029), the National Basic Research Program of China (Grant Nos. 2008CB717801, 2008CB787103, 2009GB105004, and 2010GB106002), and FRFCU (Grant No. DUT12ZD201).

Numerical study on characteristics of nitrogen discharge at high pressure with induced plasma

Wang Yi-Nan(王一男), Liu Yue(刘悦)†, Zheng Shu(郑殊), and Lin Guo-Qiang(林国强)   

  1. Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China
  • Received:2011-11-09 Revised:2012-02-09 Online:2012-06-01 Published:2012-06-01
  • Contact: Liu Yue E-mail:liuyue@dlut.edu.cn
  • Supported by:
    Project supported by the National Science Foundation of China (Grant No. 10675029), the National Basic Research Program of China (Grant Nos. 2008CB717801, 2008CB787103, 2009GB105004, and 2010GB106002), and FRFCU (Grant No. DUT12ZD201).

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摘要： Based on the fluid theory of plasma, a model is built to study the characteristics of nitrogen discharge at high pressure with induced argon plasma. In the model, the spices such as electron, N2+, N4+, Ar+, and two metastable states (N2 (A3∑u+), N2 (a1∑u-)) are taken into account. The model includes particle's continuity equations, electron's energy balance equation, and Poisson equation. The model is solved with a finite difference method. The numerical results are obtained and used to investigate the effect of time taken to add nitrogen gas and initially-induced argon plasma pressure. It is found that lower speeds of adding the nitrogen gas and varying the gas pressure can induce higher plasma density, and inversely lower electron temperature. At high-pressure discharge, the electron density increases when the proportion of nitrogen component is below 40%, while the electron density will keep constant as the nitrogen component further increases. It is also shown that with the increase of initially-induced argon plasma pressure, the density of charged particles increases, and the electron temperature as well as the electric field decrease.

关键词: induced plasma, nitrogen discharge, numerical simulation

Abstract: Based on the fluid theory of plasma, a model is built to study the characteristics of nitrogen discharge at high pressure with induced argon plasma. In the model, the spices such as electron, N2+, N4+, Ar+, and two metastable states (N2 (A3∑u+), N2 (a1∑u-)) are taken into account. The model includes particle's continuity equations, electron's energy balance equation, and Poisson equation. The model is solved with a finite difference method. The numerical results are obtained and used to investigate the effect of time taken to add nitrogen gas and initially-induced argon plasma pressure. It is found that lower speeds of adding the nitrogen gas and varying the gas pressure can induce higher plasma density, and inversely lower electron temperature. At high-pressure discharge, the electron density increases when the proportion of nitrogen component is below 40%, while the electron density will keep constant as the nitrogen component further increases. It is also shown that with the increase of initially-induced argon plasma pressure, the density of charged particles increases, and the electron temperature as well as the electric field decrease.

Key words: induced plasma, nitrogen discharge, numerical simulation

中图分类号:  (Plasma simulation)

  • 52.65.-y
52.80.Pi (High-frequency and RF discharges) 52.77.Fv (High-pressure, high-current plasmas)