中国物理B ›› 2012, Vol. 21 ›› Issue (3): 30601-030601.doi: 10.1088/1674-1056/21/3/030601

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付小倩1 2,常本康1,钱芸生1,张俊举1   

  • 收稿日期:2011-05-17 修回日期:2011-08-26 出版日期:2012-02-15 发布日期:2012-02-15
  • 通讯作者: 常本康,bkchang@mail.njust.edu.cn E-mail:bkchang@mail.njust.edu.cn

In-situ multi-information measurement system for preparing gallium nitride photocathode

Fu Xiao-Qian(付小倩)a)b), Chang Ben-Kang(常本康)a), Qian Yun-Sheng(钱芸生)a), and Zhang Jun-Ju(张俊举)a)   

  1. a. Institute of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, Nanjing 210094, China;
    b. School of Information Science and Engineering, University of Jinan, Jinan 250022, China
  • Received:2011-05-17 Revised:2011-08-26 Online:2012-02-15 Published:2012-02-15
  • Contact: Chang Ben-Kang,bkchang@mail.njust.edu.cn E-mail:bkchang@mail.njust.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 60871012) and the Natural Science Foundation of Shandong Province, China (Grant No. ZR2011FQ027).

Abstract: We introduce the first domestic in-situ multi-information measurement system for a gallium nitride (GaN) photocathode. This system can successfully fulfill heat cleaning and activation for GaN in an ultrahigh vacuum environment and produce a GaN photocathode with a negative electron affinity (NEA) status. Information including the heat cleaning temperature, vacuum degree, photocurrent, electric current of cesium source, oxygen source, and the most important information about the spectral response, or equivalently, the quantum efficiency (QE) can be obtained during preparation. The preparation of a GaN photocathode with this system indicates that the optimal heating temperature in a vacuum is about 700 ℃. We also develop a method of quickly evaluating the atomically clean surface with the vacuum degree versus wavelength curve to prevent possible secondary contamination when the atomic level cleaning surface is tested with X-ray photoelectron spectroscopy. The photocurrent shows a quick enhancement when the current ratio between the cesium source and oxygen source is 1.025. The spectral response of the GaN photocathode is flat in a wavelength range from 240 nm to 365 nm, and an abrupt decline is observed at 365 nm, which demonstrates that with the it in-situ multi-information measurement system the NEA GaN photocathode can be successfully prepared.

Key words: gallium nitride, photocathode, in-situ multi-information measurement

中图分类号:  (Measurements common to several branches of physics and astronomy)

  • 06.30.-k
07.30.Kf (Vacuum chambers, auxiliary apparatus, and materials) 71.55.Eq (III-V semiconductors) 79.60.-i (Photoemission and photoelectron spectra)