Effects of the sputtering power on the crystalline structure and optical properties of the silver oxide films deposited using direct-current reactive magnetron sputtering

doi:10.1088/1674-1056/20/2/026103

中国物理B ›› 2011, Vol. 20 ›› Issue (2): 26103-026103.doi: 10.1088/1674-1056/20/2/026103

Effects of the sputtering power on the crystalline structure and optical properties of the silver oxide films deposited using direct-current reactive magnetron sputtering

郜小勇, 张增院, 马姣民, 卢景霄, 谷锦华, 杨仕娥

The Key Lab of Materials Physics of Ministry of Education, School of Physics and Engineering, Zhengzhou University, Zhengzhou 450052, China

收稿日期:2010-08-17 修回日期:2010-09-02 出版日期:2011-02-15 发布日期:2011-02-15
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 60807001), the National Basic Research Program of China (Grant No. 2011CB201605), and the Foundation of Henan Educational Committee (Grant No. 2010A140017).

Effects of the sputtering power on the crystalline structure and optical properties of the silver oxide films deposited using direct-current reactive magnetron sputtering

Gao Xiao-Yong(郜小勇)^†, Zhang Zeng-Yuan(张增院), Ma Jiao-Min(马姣民), Lu Jing-Xiao(卢景霄), Gu Jin-Hua(谷锦华), and Yang Shi-E(杨仕娥)

The Key Lab of Materials Physics of Ministry of Education, School of Physics and Engineering, Zhengzhou University, Zhengzhou 450052, China

Received:2010-08-17 Revised:2010-09-02 Online:2011-02-15 Published:2011-02-15
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 60807001), the National Basic Research Program of China (Grant No. 2011CB201605), and the Foundation of Henan Educational Committee (Grant No. 2010A140017).

摘要/Abstract

摘要： This paper reports that a series of silver oxide (Ag_xO) films are deposited on glass substrates by direct-current reactive magnetron sputtering at a substrate temperature of 250 oC and an oxygen flux ratio of 15:18 by modifying the sputtering power (SP). The Ag_xO films deposited apparently show a structural evolution from cubic biphased (AgO + Ag₂O) to cubic single-phased (Ag₂O), and to biphased (Ag₂O + AgO) structure. Notably, the cubic single-phased Ag₂O film is deposited at the SP = 105 W and an AgO phase with <220> orientation discerned in the Ag_xO films deposited using the SP > 105 W. The transmissivity and reflectivity of the Ag_xO films in transparent region decrease with the increase the SP, whereas the absorptivity inversely increases with the increase of the SP. These results may be due to the structural evolution and the increasing film thickness. A redshift of the films' absorption edges determined in terms of Tauc formula clearly occurs from 3.1 eV to 2.73 eV with the increase of the SP.

关键词: Ag_xO film, direct-current reactive magnetron sputtering, x-ray diffraction, optical properties

Abstract: This paper reports that a series of silver oxide (Ag_xO) films are deposited on glass substrates by direct-current reactive magnetron sputtering at a substrate temperature of 250 ℃ and an oxygen flux ratio of 15:18 by modifying the sputtering power (SP). The Ag_xO films deposited apparently show a structural evolution from cubic biphased (AgO + Ag₂O) to cubic single-phased (Ag₂O), and to biphased (Ag₂O + AgO) structure. Notably, the cubic single-phased Ag₂O film is deposited at the SP = 105 W and an AgO phase withorientation discerned in the Ag_xO films deposited using the SP > 105 W. The transmissivity and reflectivity of the Ag_xO films in transparent region decrease with the increase the SP, whereas the absorptivity inversely increases with the increase of the SP. These results may be due to the structural evolution and the increasing film thickness. A redshift of the films' absorption edges determined in terms of Tauc formula clearly occurs from 3.1 eV to 2.73 eV with the increase of the SP.

Key words: Ag_xO film, direct-current reactive magnetron sputtering, x-ray diffraction, optical properties

中图分类号: (Semiconductors)

61.82.Fk

61.05.cp (X-ray diffraction) 74.25.Gz (Optical properties) 81.15.Cd (Deposition by sputtering)

郜小勇, 张增院, 马姣民, 卢景霄, 谷锦华, 杨仕娥. Effects of the sputtering power on the crystalline structure and optical properties of the silver oxide films deposited using direct-current reactive magnetron sputtering[J]. 中国物理B, 2011, 20(2): 26103-026103.

Gao Xiao-Yong(郜小勇), Zhang Zeng-Yuan(张增院), Ma Jiao-Min(马姣民), Lu Jing-Xiao(卢景霄), Gu Jin-Hua(谷锦华), and Yang Shi-E(杨仕娥). Effects of the sputtering power on the crystalline structure and optical properties of the silver oxide films deposited using direct-current reactive magnetron sputtering[J]. Chin. Phys. B, 2011, 20(2): 26103-026103.

参考文献 18

[1]	Rivers S B, Bernhardt G, Wright M W, Frankel D J, Steeves M M and Lad R J 2007 Thin Solid Films 515 8684
[2]	Fortin E and Weichman F L 1964 Phys. Status Solidi 5 515
[3]	Pierson J F, Wiederkehr D and Billard A 2005 Thin Solid Films 478 196
[4]	Varkey A J and Fort A F 1993 Sol. Energy Matt. Sol. Cells 29 253
[5]	Fuji H, Tominaga J, Men L, Nakano T, Katayama H and Atoda N 2000 Jpn. J. Appl. Phys. 39 980
[6]	Kim J, Fuji H, Yamakama Y, Nakano T, Büchel D, Tominaga J and Atoda N 2001 Jpn. J. Appl. Phys. 40 1634
[7]	Gao X Y, Wang S Y, Li J, Zheng Y X, Zhang R J, Zhou P, Yang Y M and Chen L Y 2004 Thin Solid Films 455--456 438
[8]	Gao X Y, Liu X W, Wang S Y, Liu Y F, Lin Q G and Lu J X 2008 Chin. Phys. Lett. 25 1449
[9]	Chiu Y, Rambabu U, Hsu M H, Shieh H P D, Chen C Y and Lin H H 2003 J. Appl. Phys. 94 1996
[10]	Bock F X, Christensen T M, Rivers S B, Doucette L D and Lad R J 2004 Thin Solid Films 468 57
[11]	Pierson J F and Rousselot C 2005 Surf. Coat. Technol. 200 276
[12]	Barik U K, Srinivasan S, Nagendra C L and Subrahmanyam A 2003 Thin Solid Films 429 129
[13]	Qiu J H, Zhou P, Gao X Y, Yu J N, Wang S Y, Li J, Zheng Y X, Yang Y M, Song Q H and Chen L Y 2005 J. Korean Phys. Soc. 46 S269
[14]	Gao X Y, Feng H L, Ma J M, Zhang Z Y, Lu J X, Chen Y S, Yang S E and Gu J H 2010 Physica B 405 1922
[15]	Gao X Y, Feng H L, Zhang Z Y, Ma J M and Lu J X 2010 Chin. Phys. Lett. 27 026804
[16]	Gao X Y, Feng H L, Ma J M and Zhang Z Y 2010 Chin. Phys. B 19 090701
[17]	Zhang Z Y, Gao X Y, Feng H L, Ma J M and Lu J X 2011 Acta Phys. Sin. 60 016110 (in Chinese)
[18]	Zhang Z Y, Gao X Y, Feng H L, Ma J M and Lu J X 2011 Acta Phys. Sin. 60 in press (in Chinese) endfootnotesize

Effects of the sputtering power on the crystalline structure and optical properties of the silver oxide films deposited using direct-current reactive magnetron sputtering

Effects of the sputtering power on the crystalline structure and optical properties of the silver oxide films deposited using direct-current reactive magnetron sputtering

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