中国物理B ›› 2000, Vol. 9 ›› Issue (6): 459-463.doi: 10.1088/1009-1963/9/6/011

• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇    下一篇

THE INFLUENCE OF COMPRESSIVE STRESS ON THE FORMATION OF CUBIC BORON NITRIDE THIN FILM

邓金祥, 陈光华   

  1. Department of Applied Physics, Beijing Polytechnic University, Beijing 100022, China
  • 收稿日期:1999-11-05 修回日期:1999-12-09 出版日期:2005-06-12 发布日期:2005-06-12
  • 基金资助:
    Project supported by the National Natural Science Foundation of China(Grant Nos. 69876003 and 19874007) and by the Natural Science Foundation of Beijing, China (Grant No. 2982013).

THE INFLUENCE OF COMPRESSIVE STRESS ON THE FORMATION OF CUBIC BORON NITRIDE THIN FILM

Deng Jin-xiang (邓金祥), Chen Guang-hua (陈光华)   

  1. Department of Applied Physics, Beijing Polytechnic University, Beijing 100022, China
  • Received:1999-11-05 Revised:1999-12-09 Online:2005-06-12 Published:2005-06-12
  • Supported by:
    Project supported by the National Natural Science Foundation of China(Grant Nos. 69876003 and 19874007) and by the Natural Science Foundation of Beijing, China (Grant No. 2982013).

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摘要： The elastic strain energy and Gibbs free energy of cubic BN (cBN) thin film in biaxial stress field are calculated. The results show that the stress in cBN thin films has an impact on the formation of cubic phase. It is concluded that the high compressive stress in the cBN thin films is not the cause of cBN formation. This conclusion is different from that predicted by compressive stress model; however, it could well account for the experimental results. At a given substrate temperature, there is a compressive stress threshold, below which cBN phase is thermodynamically stable and above which hexagonal BN(hBN) phase is thermodynamically stable. At room temperature the compressive stress threshold is calculated to be 9.5 GPa.

Abstract: The elastic strain energy and Gibbs free energy of cubic BN (cBN) thin film in biaxial stress field are calculated. The results show that the stress in cBN thin films has an impact on the formation of cubic phase. It is concluded that the high compressive stress in the cBN thin films is not the cause of cBN formation. This conclusion is different from that predicted by compressive stress model; however, it could well account for the experimental results. At a given substrate temperature, there is a compressive stress threshold, below which cBN phase is thermodynamically stable and above which hexagonal BN(hBN) phase is thermodynamically stable. At room temperature the compressive stress threshold is calculated to be 9.5 GPa.

中图分类号:  (Elasticity)

  • 62.20.D-
62.20.F- (Deformation and plasticity) 68.60.Bs (Mechanical and acoustical properties) 68.60.Dv (Thermal stability; thermal effects) 81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)) 81.40.Lm (Deformation, plasticity, and creep)