中国物理B ›› 2007, Vol. 16 ›› Issue (6): 1624-1631.doi: 10.1088/1009-1963/16/6/023

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A shaped annular beam tri-heterodyne confocal microscope with good anti-environmental interference capability

冯政德1, 赵维谦2, 邱丽荣2   

  1. (1)Department of Automation Measurement and Control Engineering, Harbin Institute of Technology, Harbin 150001, China; (2)School of Information Engineering, Beijing Institute of Technology, Beijing 10081, China
  • 收稿日期:2006-09-12 修回日期:2006-12-27 出版日期:2007-06-20 发布日期:2007-06-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No 50475035), the Doctoral Program of Higher Education of China (Grant No~20050213035) and the Program for New Century Excellent Talents in University of China (Grant No~NCET-05-0348).

A shaped annular beam tri-heterodyne confocal microscope with good anti-environmental interference capability

Zhao Wei-Qian(赵维谦)a)† , Feng Zheng-De(冯政德)b), and Qiu Li-Rong(邱丽荣)a)   

  1. a School of Information Engineering, Beijing Institute of Technology, Beijing 10081, China; b Department of Automation Measurement and Control Engineering, Harbin Institute of Technology, Harbin 150001, China
  • Received:2006-09-12 Revised:2006-12-27 Online:2007-06-20 Published:2007-06-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No 50475035), the Doctoral Program of Higher Education of China (Grant No~20050213035) and the Program for New Century Excellent Talents in University of China (Grant No~NCET-05-0348).

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摘要： A shaped annular beam tri-heterodyne confocal microscope has been proposed to improve the anti-environmental interference capability and the resolution of a confocal microscope. It simultaneously detects far-, on-, and near-focus signals with given phase differences by dividing the measured light path of the confocal microscope into three sub-paths (signals). Pair-wise real-time heterodyne subtraction of the three signals is used to improve the anti-environmental interference capability, axial resolution, and linearity; and a shaped annular beam super-resolution technique is used to improve lateral resolution. Theoretical analyses and preliminary experiments indicate that an axial resolution of about 1 nm can be achieved with a shaped annular beam tri-heterodyne confocal microscope and its lateral resolution can be better than 0.2 $\mu $m for $\lambda =632.8$~nm, the numerical aperture of the lens of the microscope is NA $=0.85$, and the normalized radius $\varepsilon =0.5$.

关键词: confocal microscopy, super-resolution, surface measurements

Abstract: A shaped annular beam tri-heterodyne confocal microscope has been proposed to improve the anti-environmental interference capability and the resolution of a confocal microscope. It simultaneously detects far-, on-, and near-focus signals with given phase differences by dividing the measured light path of the confocal microscope into three sub-paths (signals). Pair-wise real-time heterodyne subtraction of the three signals is used to improve the anti-environmental interference capability, axial resolution, and linearity; and a shaped annular beam super-resolution technique is used to improve lateral resolution. Theoretical analyses and preliminary experiments indicate that an axial resolution of about 1 nm can be achieved with a shaped annular beam tri-heterodyne confocal microscope and its lateral resolution can be better than 0.2 $\mu $m for $\lambda =632.8$~nm, the numerical aperture of the lens of the microscope is NA $=0.85$, and the normalized radius $\varepsilon =0.5$.

Key words: confocal microscopy, super-resolution, surface measurements

中图分类号:  (Optical communication systems, multiplexers, and demultiplexers?)

  • 42.79.Sz
07.60.Pb (Conventional optical microscopes)