中国物理B ›› 2006, Vol. 15 ›› Issue (2): 454-459.doi: 10.1088/1009-1963/15/2/037

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Experimental study of noncontact ultrasonic motor with non-symmetrical electrode

杨斌, 刘景全, 陈迪, 周伟民, 蔡炳初   

  1. National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University,Shanghai 200030, China
  • 收稿日期:2005-09-05 修回日期:2005-10-20 出版日期:2006-02-20 发布日期:2006-02-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No 50205017).

Experimental study of noncontact ultrasonic motor with non-symmetrical electrode

Yang Bin (杨斌), Liu Jing-Quan (刘景全), Chen Di (陈迪), Zhou Wei-Min (周伟民), Cai Bing-Chu (蔡炳初)   

  1. National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University,Shanghai 200030, China
  • Received:2005-09-05 Revised:2005-10-20 Online:2006-02-20 Published:2006-02-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No 50205017).

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摘要： We have proposed a novel noncontact ultrasonic motor based on non-symmetrical electrode driving. The configuration of this electrode and the fabrication process of rotors are presented. Its vibration characteristics are computed and analysed by using the finite element method and studied experimentally. Good agreement between them is obtained. Moreover, it is also shown that this noncontact ultrasonic motor is operated in antisymmetric radial vibration mode of $B_{21}$ mode. The maximum revolution speed for three-blade and six-blade rotors are 5100 and 3700\,r/min at an input voltage of 20V, respectively. Also, the noncontact high-speed revolution of the rotors can be realized by the parts of I, III of the electrode or II, IV of the electrode. The levitation distance between the stator and rotor is about 140$\mu $m according to the theoretical calculation and the experimental measurement.

关键词: non-symmetrical electrode, noncontact, travelling wave, ultrasonic motor

Abstract: We have proposed a novel noncontact ultrasonic motor based on non-symmetrical electrode driving. The configuration of this electrode and the fabrication process of rotors are presented. Its vibration characteristics are computed and analysed by using the finite element method and studied experimentally. Good agreement between them is obtained. Moreover, it is also shown that this noncontact ultrasonic motor is operated in antisymmetric radial vibration mode of $B_{21}$ mode. The maximum revolution speed for three-blade and six-blade rotors are 5100 and 3700 r/min at an input voltage of 20V, respectively. Also, the noncontact high-speed revolution of the rotors can be realized by the parts of I, III of the electrode or II, IV of the electrode. The levitation distance between the stator and rotor is about 140$\mu $m according to the theoretical calculation and the experimental measurement.

Key words: non-symmetrical electrode, noncontact, travelling wave, ultrasonic motor

中图分类号:  (Electric motors)

  • 84.50.+d
85.50.-n (Dielectric, ferroelectric, and piezoelectric devices)