中国物理B ›› 2005, Vol. 14 ›› Issue (8): 1608-1612.doi: 10.1088/1009-1963/14/8/025
黄松, 辛煜, 宁兆元
Huang Song (黄松), Xin Yu (辛煜), Ning Zhao-Yuan (宁兆元)
摘要: C4F8 plasma with the addition of H2 is generated by the inductively coupled plasma (ICP) method. The relative densities of CF,CF2, H and F radicals are determined by actinometric optical emission spectroscopy (AOES) as a function of the gas flow rate ratio R=H2/(H2+C4F8 at a pressure of 0.8 Pa and an input r.f.power of 400W, while that of HF is measured by quadrupole mass spectrometry (QMS). The results show that plasma activity increases firstly and then decreases with increasing R. As the gas flow rate ratio R changes from 0 to 0.625, relative densities of both CF and CF2 decrease, and the relative [CF] has a similar tendency as the calculated [CF], indicating that CF radicals are generated mainly by the electron impact dissociation of CF2 radicals. Production of HF is also discussed.
中图分类号: (Emission, absorption, and scattering of electromagnetic radiation ?)