A new method of measuring the spatial distribution of  depletion fraction of silane plasma by mass spectrometer

doi:10.1088/1009-1963/14/7/025

中国物理B ›› 2005, Vol. 14 ›› Issue (7): 1413-1417.doi: 10.1088/1009-1963/14/7/025

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇下一篇

A new method of measuring the spatial distribution of depletion fraction of silane plasma by mass spectrometer

王照奎, 林揆训, 林璇英, 邱桂明, 祝祖送

Department of Physics, Shantou University, Shantou 515063,China

收稿日期:2004-07-15 修回日期:2005-03-15 出版日期:2005-06-22 发布日期:2005-06-22
基金资助:
Project supported by the State Key Development Program for Basic Research of China (Grant No G2000028208).

A new method of measuring the spatial distribution of depletion fraction of silane plasma by mass spectrometer

Wang Zhao-Kui (王照奎), Lin Kui-Xun (林揆训), Lin Xuan-Ying (林璇英), Qiu Gui-Ming (邱桂明), Zhu Zu-Song (祝祖送)

Department of Physics, Shantou University, Shantou 515063,China

Received:2004-07-15 Revised:2005-03-15 Online:2005-06-22 Published:2005-06-22
Supported by:
Project supported by the State Key Development Program for Basic Research of China (Grant No G2000028208).

摘要/Abstract

摘要： A newly established movable sampling apparatus of mass spectrometer is used to measure the spatial distribution of depletion fraction of silane plasma.A straight-line fit method of deducing the depletion fraction of silane is proposed. Theoretical analysis and test results demonstrate that the proposed new method is universal and more accurate than the existing one.There exist a largest peak near the middle of two electrodes and two peaks near the electrodes in the spatial distribution of silane depletion fraction, which are related to the distribution of electric field and the silane plasma sheaths.

Abstract: A newly established movable sampling apparatus of mass spectrometer is used to measure the spatial distribution of depletion fraction of silane plasma.A straight-line fit method of deducing the depletion fraction of silane is proposed. Theoretical analysis and test results demonstrate that the proposed new method is universal and more accurate than the existing one.There exist a largest peak near the middle of two electrodes and two peaks near the electrodes in the spatial distribution of silane depletion fraction, which are related to the distribution of electric field and the silane plasma sheaths.

Key words: movable sampling apparatus of mass spectrometer, spatial distribution, straight-line fit, depletion fraction of radio frequency (rf) glow discharge

中图分类号: (Plasma sheaths)

52.40.Kh

52.80.Hc (Glow; corona)

王照奎, 林揆训, 林璇英, 邱桂明, 祝祖送. A new method of measuring the spatial distribution of depletion fraction of silane plasma by mass spectrometer[J]. 中国物理B, 2005, 14(7): 1413-1417.

Wang Zhao-Kui (王照奎), Lin Kui-Xun (林揆训), Lin Xuan-Ying (林璇英), Qiu Gui-Ming (邱桂明), Zhu Zu-Song (祝祖送). A new method of measuring the spatial distribution of depletion fraction of silane plasma by mass spectrometer[J]. Chinese Physics, 2005, 14(7): 1413-1417.

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A new method of measuring the spatial distribution of depletion fraction of silane plasma by mass spectrometer

A new method of measuring the spatial distribution of depletion fraction of silane plasma by mass spectrometer

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